Vacuum pump
Vacuum pump
Developed and commercialized through years of research and the latest technology, we offer a variety of pumps and related components to meet all customer needs, ranging from low vacuum to ultra-high vacuum.
1～7 item / All 7 items
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Ion pump/noble pump control device "P-500"
Improved visibility and functionality with the new design! Suitable for automation equipment and remote control devices.
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Vacuum pump "Ion pump - Noble pump"
No vibration, no noise! You can use it safely for unmanned driving at night without worrying about contaminating the exhaust system!
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Ultra-high vacuum compatible sputter ion pump "Excel Pump"
40% size reduction! Achieves high efficiency with built-in baking heater and moisture retention cover.
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POWER Series High-Performance Cryopump (Compact)
Small type with an intake diameter of 8 to 12 inches! Achieved safe high-speed regeneration without a heater.
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POWER Eco Series High-Performance Energy-Saving Cryopump
In addition to small models, we also offer medium and large sizes! They have significant advantages in both performance and energy efficiency.
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Vacuum Pump "Foreline Trap"
It is possible to easily prevent the backflow of oil vapor! It efficiently adsorbs oil molecules.
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Canon Anelva Corporation Company Profile
Contributing to the development of society! Providing high value-added products using ultra-vacuum technology.
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