POWER Series High-Performance Cryopump (Compact)
Small type with an intake diameter of 8 to 12 inches! Achieved safe high-speed regeneration without a heater.
The POWER series product is a high-performance cryopump that enhances practical exhaust performance and temperature stability during multi-operation. The average value of vibration acceleration is less than about one-tenth compared to conventional models (our comparison). Even if only one pump is regenerated during multi-operation, the startup time does not become excessively long, minimizing changes in startup time due to operating conditions. 【Features】 ■ Achieves safe, heater-less high-speed regeneration ■ Excellent practical startup characteristics and temperature stability ■ Low vibration ■ Maintains good exhaust performance up to the limit of argon exhaust capacity ■ Significantly increases refrigeration capacity, sustaining stable hydrogen exhaust performance for extended periods *For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Other Features】 ■ No worries about sparks, discharges, or leakage since no heater is used. ■ Significantly improved resistance to unbalanced thermal loads entering multi-operation pumps. ■ Capable of more stable operation that is resistant to thermal loads. ■ Triple operation is possible even with a 12-inch cryopump. *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment) ■ Electronic component manufacturing equipment ■ Vacuum deposition equipment ■ Vacuum furnaces, space chambers ■ Accelerators ■ Various high vacuum equipment *For more details, please refer to the PDF document or feel free to contact us.
