Ultra-high vacuum compatible sputter ion pump "Excel Pump"
40% size reduction! Achieves high efficiency with built-in baking heater and moisture retention cover.
The "Excel Pump" is a compact and lightweight vacuum pump. Based on an ion pump, it has been developed by improving the discharge characteristics in low-pressure regions, featuring pump elements and a built-in heater that enables efficient baking. Additionally, the incorporation of a NEG (non-evaporable getter) pump allows for the achievement of XHV. 【Features】 ■ High exhaust capacity in UHV and XHV regions ■ Realization of high-efficiency baking ■ Compact and lightweight ■ Compatible with clean rooms *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Other Features】 - Improved discharge in low pressure regions with a newly developed pump element, achieving 10^-10 Pa range with the NEG (non-evaporative getter) module. - High efficiency realized with an integrated baking heater and moisture retention cover. - 40% size reduction (compared to our previous models). - The cover and magnets are coated with a smooth surface heat-resistant paint. *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Ultra-high vacuum and extreme high vacuum exhaust systems that are completely oil-free ■ Electron microscopes, surface analysis equipment ■ Particle accelerators, nuclear fusion experimental devices, space environment testing equipment ■ Vacuum holding pumps such as electron tubes *For more details, please refer to the PDF document or feel free to contact us.
