POWER Eco Series High-Performance Energy-Saving Cryopump
In addition to small models, we also offer medium and large sizes! They have significant advantages in both performance and energy efficiency.
The POWER Eco series product is a high-performance energy-saving cryopump developed with the aim of reducing power consumption and cooling water usage from an energy-saving perspective. Due to the increased efficiency of refrigeration units and multi-wave control, the number of cryopumps that can be operated with a single compressor has increased, significantly reducing power consumption and cooling water usage per unit. 【Features】 ■ Effective for energy and resource savings [Power consumption, cooling water usage: Reduction of 15-70% possible] ■ Shortened regeneration and startup time [Less than half compared to conventional models (compared to our company)] ■ Improved exhaust performance [Substantially increased effective argon exhaust capacity by 1.5 to 4 times (compared to our company)] ■ Low vibration [Approximately 1/10 or less compared to conventional models] *For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Lineup (Partial)】 <Small> ■P-085C ■P-086C <Medium/Large> ■P-128C ■P-128CL ■P-160C *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Applications】 ■ Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment) ■ Electronic component manufacturing equipment ■ Vacuum deposition equipment ■ Vacuum furnaces, space chambers ■ Accelerators ■ Various high vacuum equipment *For more details, please refer to the PDF document or feel free to contact us.
