Quadrupole mass spectrometer (high-speed measurement/high-sensitivity measurement)
Selectable from two types of ion sources! A quadrupole mass spectrometer capable of high-speed measurement and high-sensitivity measurement.
Canon Anelva Corporation offers high-performance and high-functionality quadrupole mass spectrometers capable of measuring mass numbers up to 410 amu. We provide the "M-401QA-MGSY/MUSY," which can acquire data at intervals of 1 second for m/z = 1 to 410, and the "M-401QA-MGHY/MUHY," which features high sensitivity with an 8-digit dynamic range. You can choose between UHV type (cage type) and gas introduction type (box type), and we employ an ion source with low gas emission and have degassing functionality. 【Features】 ■ Choice of UHV type (cage type) or gas introduction type (box type) ■ Adoption of an ion source with low gas emission ■ Degassing functionality included *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Lineup】 ■ High-speed type ・M-401QA-MGSY ・M-401QA-MUSY ■ High-sensitivity type ・M-401QA-MGHY ・M-401QA-MUHY *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Accelerator vacuum gas monitor ■ Inorganic gas analysis ■ Thermal balance desorption gas analysis ■ Temperature-programmed desorption gas analysis ■ Trace gas analysis ■ PFC gas analysis *For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.