HFE vapor drying device
Products that fully consider safety.
By using a plate heater with polished technology and special surface treatment on the bottom surface of the vapor generation tank, it is possible to uniformly boil the HFE within the vapor generation tank and generate uniform vapor inside the tank. *For more details, please download the PDF (catalog) or feel free to contact us.
basic information
【Features】 ■ By using a plate heater with polished technology on the bottom surface of the vapor generation tank and special surface treatment, HFE can be uniformly boiled within the vapor generation tank, generating uniform vapor throughout the tank. ■ Since HFE vapor condenses uniformly on the entire surface of each substrate, uniform drying treatment can be performed on all substrates. ■ As it is a quartz tank, there are no metal solutes.
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Applications/Examples of results
Semiconductor manufacturing process, electronic materials manufacturing process, etc.
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