Vacuum heating furnace with a bomb
It is a device that removes impurities attached to high-purity gas cylinders used in semiconductor manufacturing processes.
We remove impurities adhering to the inner walls of the cylinder through heating and vacuum extraction. The cylinder size and the number of units processed simultaneously can be customized. We can propose automatic or manual machines according to your budget. 【Features】 ■ Uniform heating of the cylinder is possible (Max 200℃). The temperature inside the furnace is approximately ±1%. ■ Simultaneous cooling of the safety valve of the cylinder is possible during heating (to prevent damage to the safety valve due to heat). * For more details, please download the PDF (catalog) or feel free to contact us.
basic information
For more details, please download the PDF (catalog) or feel free to contact us.
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Delivery Time
Applications/Examples of results
High purity gas manufacturing process, semiconductor gas manufacturing process, etc.
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