Exhaust gas treatment system (scrubber) for semiconductor manufacturing equipment
By installing an indoor scrubber that corresponds to exhaust gas and airflow, a safe operating environment can be achieved even in places without exhaust gas treatment facilities.
- It can be installed in accordance with devices such as etching and cleaning equipment. - Gases such as acids and alkalis are treated appropriately. - By properly processing with a scrubber, there is no impact on the ducts and equipment in the subsequent processes. Additionally, even if exhausted outdoors, there are no concerns for the surrounding environment or human health. *For more details, please download the PDF (catalog) or feel free to contact us.*
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【Features】 Properly handles gases such as acids and alkalis. By appropriately treating them with a scrubber, there is no impact on the ducts and equipment in subsequent processes. Additionally, even when discharged outdoors, there are no concerns for the surrounding environment or human health. Scrubber: Neutralizes and discharges volatile gases generated from chemical solution tanks and other sources using a scrubber.
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