FOUP cleaning device
It is a device that uses a special high-pressure nozzle, allowing for cleaning and drying without the use of chemicals.
【Reduction of Environmental Impact】 - Only pure water is used for the cleaning solution. - The amount of pure water used is less compared to other products. 【High Cleaning Capability】 - Capable of cleaning residues and particles with a unique cleaning process. - Can generate warm air instantly. (From room temperature to 65°C in 3 seconds) - Allows for separate cleaning of the FOUP BOX and its lid. - Rapid cleaning of stubborn adhesives and particles is possible with the adoption of instant heating. - High-pressure cleaning enables the removal of contaminants with strong adhesion, such as resist. *Max approximately 10MPa (1500psi) can be adjusted in the recipe.
basic information
OHT and AGV compatible Can be used in conjunction with frame FOUP and FOSB The device is compact. 6-axis robot not used Compatible with both manual and automatic machines The cleaning room can be selected as a vacuum chamber or a normal pressure chamber Can meet requirements for VOC, AMC (molecular contaminants), particles, and humidity
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FOUP cleaning
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