Titanium is frequently used in such applications to form a very hard titanium nitride (TiN) coating on the target products. Titanium coatings are often used for decorative purposes on jewelry, household appliances, and automotive trim due to their golden appearance. Similar coatings may also be used on the surfaces of medical devices and instruments as non-toxic options. This type of coating is now being applied in advanced biomedical devices, including in vivo biosensors. The coating of titanium nitride generally employs the CVD process. In this process, multiple chemicals (TiCl4, N2, H2) are supplied to a furnace and reacted at high temperatures to produce titanium nitride, which is then deposited on the surface as a coating. It is crucial for the integrity, appropriate thickness, and uniformity of the coating to accurately deliver these materials to the furnace.

The Pirani vacuum gauge "VersaTorr Series" features the BVT100 series with a dual sensor system combining diaphragm and MEMS Pirani types, and the BVT200 series with a triple sensor that integrates a capacitance manometer for wider range measurements. The newly developed MEMS Pirani sensor enables wide-range measurements down to 7.5 x 10E-7 Torr, which is one order of magnitude lower than typical MEMS Pirani sensors. By covering the high-pressure range of 1.5 to 1000 Torr, where the Pirani sensor is affected by gas thermal losses, with a diaphragm type, it allows for wide-range measurements from 7.5 x 10E-7 to 1000 Torr. For more detailed information, please visit the following website (English version): https://www.brooksinstrument.com/en/products/pressure-vacuum/pirani-transducers

"MFC equipped with PTI (Pressure Variation Resistance)" The 'GF125 series,' featuring ultra-fast response and high cleanliness, is a metal-sealed mass flow controller equipped with second-generation PTI (Pressure Variation Resistance). It significantly reduces the impact of inlet pressure fluctuations on process gas flow rates. The MultiFlo technology, standard in the GF125, allows for thousands of combinations of gas types and ranges without disconnecting the flow meter from the gas line or compromising accuracy. This feature contributes to reducing the size and cost of gas panels by reviewing pressure regulators, pressure transducers, and related hardware installed in the process line, alongside industry-leading PTI performance that maximizes yield and productivity. Applications: ■ Semiconductor etching tools ■ MOCVD ■ Gas flow control applications requiring high-purity all-metal flow paths

The Brooks Expert Support Tool 'BEST (Brooks Enhanced Support Tool)' is a Windows-based application software designed to control high-performance mass flow controllers, meters, and pressure controllers specifically for the SLA58XX and SLAMfXX series. By using this tool, you can utilize functions including setup, configuration, diagnostics, troubleshooting, valve adjustment, and calibration (a separate license key is required). You can access the diagnostic port located at the top of the device by connecting it to your computer with a dedicated cable. For specifications, licensing requirements, and operation methods, please contact us. Please check the following page for compatible products: https://www.brooksinstrument.com/ja-jp/products/accessories-software/product-software/brooks-expert-support-tool ■ Currently available versions V5.14.1.0 V5.12.0.0 V5.10.0.0

The 0250 series is a secondary electronics unit equipped with an RS232 serial port, in addition to power supply and analog control functions. This innovative and reliable microcomputer-based controller is available in two models. 【Model 0251】 Supplies power to one Brooks mass flow or pressure device. 【Model 0254】 Supplies power to up to four Brooks mass flow or pressure devices. This device, compliant with the RoHS directive, features very user-friendly operability and offers mounting options for easy installation in a variety of applications.

Model GF40 "One device supports various gases and flow rates" The ability to accommodate multiple gases with a single device maximizes process flexibility and productivity. The GF40 series elastomer-sealed mass flow controllers/meters, equipped with Brooks Instrument's proprietary MultiFlo technology, are ideal for systems, processes, and facilities that use diverse gases, frequently change gas types, or need to recalibrate ranges while maintaining measurement and control accuracy. With unprecedented flow measurement and control performance, it elevates process flexibility to a new dimension. Applications ■ Solar cell CVD (Chemical Vapor Deposition) systems ■ Life science bioreactors ■ Vacuum processes ■ Nanotechnology/MEMS manufacturing ■ Plasma, glass, web coating systems ■ Options for manifold/gas supply systems

- I want to hear the product explanation, but there is not enough information through email or phone. - It is difficult to find time for a meeting. By conducting the product explanation in a video conference format, we believe that you will be able to understand our products more deeply while sharing materials with you, almost like an in-person meeting. Please feel free to take advantage of our online product explanation service. <Flow of Online Product Explanation> ▼ STEP 1 | Application ▼ STEP 2 | Application Acceptance We will send you an email from our representative with the date and time for the online product explanation and the link for the video conference. ▼ STEP 3 | Online Product Explanation On the day of the meeting, access the link provided in the email to start the video conference. We will use Microsoft Teams for the video conference. Installation of the software is not required, but please feel free to consult us if you have any other service requests.

Surfaces of industrial and consumer products may be coated to optimize their finish. For example, it is possible to improve the wear resistance of cutting tools, scratch resistance of glass, thermal properties of sheet glass, and aesthetics of household appliances. There are various coating methods such as chemical vapor deposition, physical vapor deposition, plasma treatment processes, and thermal spraying, but they are often performed as the final stage of the manufacturing process. Brooks Instrument's mass flow, vacuum, and pressure measurement and control devices cover PVD and CVD process applications. They are also suitable for surface treatment applications such as heat treatment and plasma processing. 【Features】 ■ Highly reproducible, high-precision gas supply ■ Excellent quality, accurate thickness, uniformity of film thickness ■ Long-term stable process control ■ High-functionality flow diagnostics and trend analysis in the field to maximize process yield

"Achieving the highest flow accuracy in ultra-high purity DI steam supply" The Vapor Delivery Module (VDM) features an energy-efficient design that generates ultra-high purity vaporized gas even at low temperatures. It employs proven steam delivery technology and is equipped with advanced digital control and comprehensive diagnostic functions. Compared to flash vaporization systems, it achieves superior accuracy, high flow rates, a wide control range, and low power consumption. Based on proven thermal mass flow measurement technology, it generates steam even in non-heated conditions, eliminating the influence of pure water, thus ensuring high reliability and high purity manufacturing. An independent service port and intuitive GUI provide user-friendly data logging and diagnostic capabilities. Applications: ■ Post-process for metal etching of silicon semiconductors ■ Metal strip process for silicon semiconductors ■ Ultra-high purity humidification in low atmospheric pressure environments For more details, please visit https://www.brooksinstrument.com/ja-jp/products/vaporization/vapor-delivery-modules/vdm300

■ Mass Flow Controller/ Meter "GF40 Series" This device supports multiple gases, maximizing process flexibility and productivity. The GF40 series elastomer-sealed mass flow controller/meter, equipped with Brooks Instrument's unique MultiFlo technology, is ideal for systems, processes, and facilities that use diverse gases, frequently change gas types, or need to readjust ranges while maintaining measurement and control accuracy. It offers unprecedented flow measurement and control performance, elevating process flexibility to a new dimension. ■ Readout Unit "0254" *RoHS Compliant Product* The 0250 series is a secondary electronics unit equipped with an RS232 serial port, in addition to power supply and analog control functions. This RoHS-compliant device features very user-friendly operability and offers installation options to easily fit into various application environments. It provides power for up to four Brooks mass flow or pressure devices.

How can digital mass flow controllers and Ethernet-based network protocols improve your production processes? <Solving process challenges with abundant data from measuring instruments> - Evolution of digital communication - Types of digital communication protocols - Benefits of "digitalization" - How digital protocols enhance the added value of equipment - Digital applications: Flow integration in gas usage monitoring - Digital applications: Flow integration measurement in bioreactors - Considerations when selecting digital communication protocols - Expanding the portfolio of digital devices

Model 3809G / 3809G ELF / 3809G TFE Lined / 3810G "Proven meters that accommodate a wide range of temperatures, pressures, and processes" With a structure that can be installed in harsh environments, both indoors and outdoors: For high-pressure conditions, low or high-temperature fluids, and remote monitoring applications, please consider the "MT3809 Series Metal Tube Area Flow Meter." The MT3809 Series boasts a wealth of experience in the reliable and repeatable measurement of gas and liquid flow, making it a key product for equipment selection in engineering companies (EPC) and large plants worldwide. Applications ■ Basic measurement of liquid or gas flow ■ Monitoring lubricants and cooling water for rotating equipment ■ Measurement of additives ■ Monitoring gas for smelting furnaces (kilns) ■ High-pressure flow on offshore oil platforms ■ Chemical injection

We have over 70 years of global experience in more than 80 countries! When project design, procurement, and construction (EPC) contractors require high-performance flow meter technology and advanced technical expertise, we become a reliable supplier for accurate solutions. Our products are adopted in various application fields, from nuclear and biotechnology to power and petrochemicals, which is why we have over 70 years of global experience in more than 80 countries. The performance and value of our products prove this, and we provide suitable support to EPC partners for each project. 【Features】 <MT3809 Series Metal Tube Area Flow Meter> ■ Robust design that accommodates high process pressures ■ Alarm function complies with SIL 2 requirements ■ Multiple corrosion-resistant wetted materials and indicator housings available ■ Complies with ASME B31.3 standards

In industries such as biotechnology, certification is used to ensure the calibration accuracy of flow control. Equipment that measures and controls fluid flow must be calibrated at the time of initial manufacture and then regularly recalibrated to guarantee accurate measurement and control. For measurement instrument manufacturers like Brooks Instrument, the calibration of flow measurement and control equipment using high-precision measurement systems is essential. In fact, the tightening of regulations in industries such as biotechnology places even greater demands on measurement instrument manufacturers to document known uncertainties through certification. For example, in biotechnology process systems, mass flow controllers (MFCs) control the supply of process gases such as oxygen and carbon dioxide to bioreactors. Accurately and consistently supplying these gases is one of the factors that process managers seek to verify and manage in order to maximize the yield, performance, and uptime of the bioreactor.

The research example of catalysts discussed here is the Haber-Bosch process, which produces ammonia for fertilizers on an industrial scale. The Haber-Bosch process involves reacting nitrogen and hydrogen using a metal catalyst under high temperature and pressure to produce ammonia. Research on catalysts is constantly advancing, and various catalysts have been discovered today. Initially, osmium was used as the catalyst in the Haber-Bosch process, but now iron ore is used as the catalyst. Catalyst research is conducted in pilot plants. Pilot plants provide valuable early-stage scientific data regarding reactions, material properties, and process yields, thereby reducing the technical and commercial risks associated with large-scale process plants. In this research, experiments are conducted while monitoring all parameters, including pressure, temperature, flow rate, and reaction time.

<Published Content> Mass Flow Controllers / Mass Flow Meters Pressure Controllers Area Flow Meters Pressure and Vacuum Products Secondary Electronics & Software Communication Protocols Service & Support This is a product guide that summarizes the main features and performance in an easy-to-read format. Please make use of it.

A world where miniaturization and high performance are advancing daily. Mobile phones now have features that were unimaginable just a few years ago. The realization of such high performance is thanks to thin film technology, which is utilized in a wide range of applications as follows: 【Applications of Thin Film Technology】 - Microelectronics - Anti-reflective coatings for glass - Antibacterial metal coatings for medical devices - Flexible solar cells Thin film technology is defined as "the process of creating, coating, and processing thin film materials on a substrate surface." We are currently publishing basic knowledge materials on glass coatings for the glass industry! ⚫ Glass Coatings ⚫ What is Low-E Glass? ⚫ Laminating and Materials of Low-E Coatings ⚫ Application Requirements ⚫ What is Low-E Coating Technology? ⚫ Glass Coating Market Please take a moment to read it. https://mono.ipros.com/news/detail/129167/

Brooks has added a mass flow controller specifically designed for bioprocesses to its range of general-purpose mass flow controllers. In this article, we will introduce this product and its distinctive advantages. 1. One MFC can cover the necessary spare parts for each type of gas. 2. With a control range of 1:250, it enables high-precision and accurate flow control, reducing the number of MFCs needed. 3. It accommodates a wide range of bioreactor needs, from benchtop types to large stainless steel tanks. There is a wealth of adoption experience for both single-use and multi-use applications. For more detailed product specifications, case studies, and advantages, please feel free to contact us. A representative well-versed in flow control and bioreactors will assist you.

Hot Melt Extrusion (HME) is a method that uses heat and pressure to melt polymers and extrude them into molds in a continuous process. HME is widely applied in the plastics industry and has recently been used in pharmaceutical formulations and drug delivery systems. The HME process is used to mix active pharmaceutical ingredients (APIs) with polymers and other excipients at high temperatures and pressures. The extruded material can be cut or crushed into micro-pellets for filling into capsules or compressing into tablets. Highlights: Measurement and control of mass flow rate of supercritical CO2 Achieving accurate flow rates even at low temperatures (below -30°C) Process Solution: Due to the high reliability of Brooks Instrument's Quantim Coriolis mass flow measurement and control for fluids, systems using this mass flow can measure and control the mass flow rate of the liquid CO2 being injected, rather than the pump's operating speed. In the HME process, when CO2 is maintained above its critical temperature and critical pressure, it enters a supercritical state.

In the EtherNer/IP model, when scaling up a system built at a desktop research lab level to manufacturing level, it is relatively easy to implement specification changes from single control to recipe control. The SLA5800 series is available in a flow range from 3cc/min to a maximum of 2500L/min, allowing for scaling up by adjusting parameters to match the maximum capacity using recipes and interfaces. When replacing or adding MFCs in the evaluation system, it can be done simply with just a LAN cable and a power cable, without the need for additional hardware. This not only contributes to flexible system changes but also significantly improves space efficiency and maintainability. At the same time, IoT integration is also possible. Remote operation can be incorporated on a PC basis with a low barrier to implementation. The SLA5800 series bio package uses FDA-compliant elastomers. It is capable of providing documentation and evidence, while also increasing the shielding rate during valve closure compared to conventional products, enabling more precise adjustments of dissolved oxygen (DO) levels, particularly in oxygen control. ITW Japan Co., Ltd. Brooks Instrument

In the manufacturing process of active pharmaceutical ingredients for biopharmaceuticals, including antibody drugs and vaccines, the goal is to culture and scale up biological entities such as viruses and cells, necessitating the creation of an environment conducive to the survival of the target organisms. The research and development department continuously seeks the optimal conditions for each type of cell or virus, which involves adjusting the flow rates of air, oxygen, nitrogen, and carbon dioxide to achieve optimal concentrations. Additionally, it is crucial to maintain a stable environment by adjusting the flow rates of each gas in response to monitoring results of pH and dissolved oxygen concentration. Particularly for oxygen, even small flow rates can lead to a rapid increase in dissolved oxygen concentration, requiring precise control of the flow rates. The SLA5800 series has a proven track record in many culture devices and facilities, continuing from the previous generation 5800E/i series, and is a stable product line with a large number of units shipped and consistent maintenance continuity. ITW Japan Co., Ltd. Brooks Instrument

The importance of gas flow control and mass flow controllers in the manufacturing of biopharmaceuticals, including antibody drugs, has been frequently introduced. This time, we will introduce the applications of mass flow controllers/flow meters in medical devices. In the manufacturing and control of respiratory-related medical devices, flow meters and mass flow controllers are utilized. The key factor is to maintain the appropriate ratio of oxygen and carbon dioxide concentrations in the respiratory gas, optimizing blood concentrations. It is necessary to precisely adjust and supply the gas flow of air/oxygen. The requirements include the ability to adjust gas flow to maintain appropriate concentrations in the respiratory gas and the functionality to mix/blend. Additionally, it is important to ensure that appropriate materials are used for medical devices/equipment. For gas blending applications, we offer a range of products including area flow meters (including those with valves), the SLA5850 series mass flow controllers, and the SLA5850 Biotech package, which comes pre-installed with the required four types of gas calibration data and uses materials compliant with USP standards. ITW Japan Co., Ltd. Brooks Instrument

The SLA5800 series has passed the explosion-proof structure electrical machinery equipment type certification (domestic explosion-proof: DEK20.0062X). The products in question are as follows: ● Mass Flow Controller SLA585x series ● Mass Flow Meter SLA586x series ● Pressure Controller SLA5800 series * The pressure controller is the only product that complies with domestic explosion-proof standards. We are now ready to accept orders. For details on delivery times, prices, and specifications, please contact us at the address below or through our agents. ----------------------- Contact Information ITW Japan Co., Ltd. Brooks Instrument 1-4-4 Kitasuna, Koto-ku, Tokyo 136-0073 Phone: 03-5633-7125 Email: Sales-Japan@brooksinstrument.com

The VDM300, designed for advanced stripping and passivation processes after metal etching, achieves superior accuracy, high flow rates, a wide control range, and low power consumption compared to flash vaporization systems. Features of the VDM300: 1. Flow range: 3 slpm (DIW vapor) 2. Direct steam measurement for excellent flow accuracy 3. Direct connection to the plant's pure water supply system 4. Operable even at minimum temperature (non-heated state) 5. Optimally designed for rinsing and drainage 6. EtherCAT digital communication 7. Brooks Expert Support Tool (BEST) graphical interface

Thank you very much for your continued patronage. We apologize for the inconvenience, but we will be closed for the New Year holidays from December 28 (Saturday) to January 5 (Sunday). We will resume operations on January 6 (Monday) for the 2025 fiscal year. We appreciate your understanding.

The GF40 series is a mass flow controller/meter equipped with our proprietary MultiFlo technology. This feature allows for configuration changes to thousands of different specifications using the MultiFlo(TM) configurator (dedicated software) based on the gas type and full scale at the time of purchase. Please refer to the FloCom database for the available gas types and ranges. ▽FloCom Database (xls format file) https://cdn.brooksinstrument.com/-/media/brooks/documentation/products/accessories-and-software/software/multiflo-configurator/flocom-database-db220418---gf40-gas-listing.xls Utilize the highly accurate GF40 series, equipped with data for over 100 real gases, customized to meet your specific applications.

Automate pressure control and use it as a pressure/back pressure regulator! The Auto Pressure Controller "SLA/SLAMf Series" is equipped with a wealth of options and features. By combining the SLA/SLAMf Series with mass flow controllers and meters, you can achieve consistency in control (process) with the advantages of a single platform. The SLA/SLAMf Series uses a primary flow calibration system that is traceable to international standards, characterized by high precision, long-term stability of the zero point, and excellent reproducibility based on our superior measurement systems and methods. Applications: ■ Thin film processes ■ Catalyst research and pilot processes in chemical and petrochemical industries ■ Laboratory and analytical systems ■ Fuel cell technology ■ Life sciences bioreactors

Excellent long-term stability and maintenance of production accuracy! High reliability, precision, and repeatability in measurement and control. The '5850E Series' is an elastomer-sealed thermal mass flow controller/meter. With a proven track record of active use in thousands of applications worldwide for several decades, this series is equipped with a unique stable flow sensor that provides the high reliability, precision, and repeatability in measurement and control required for today's demanding industrial production processes. 【Features】 ■ Removable flow sensor ■ No influence from installation orientation ■ Mechanical/electrical compatibility with other mass flow controllers ■ Electric valve override ■ Corrosion-resistant valve

Are you having trouble selecting repairs or alternatives for the old mass flow meters known as Legacy that you are currently using? Over the past 20 years, various manufacturers' mass flow meters have been sold in the market, many of which are still in operation today. Did you know that Brooks Instrument has consolidated the mass flow meter manufacturers that handled those devices and is providing comprehensive support for repairs and alternative product suggestions? We provide support for all mass flow meters previously sold by various manufacturers, including Tylan General, Mykrolis, Entegris, UNIT, Kinetics, and Celerity. This accounts for nearly 80% of the Legacy mass flow meters that are still actively used in today's market. In some cases, we offer repairs, while in others, we suggest replacing them with our best-selling GF series mass flow meters based on customer requests. Please feel free to consult us if you are having trouble with repairs or replacements for Legacy mass flow meters.

In recent years, processes using high-pressure gas have become increasingly active, leading to a growing demand for mass flow controllers and meters that comply with the High-Pressure Gas Safety Act. Since 2018, our company has been providing products that have passed the high-pressure gas equipment testing (KHK certification) for thermal mass flow controllers (SLA5850), primarily to the chemical and petrochemical industries, and we have built a track record of deliveries. With the recent expansion of the design pressure of our mass flow controllers to 20MPa, which can be used with cylinder pressure, we are now able to apply them to an even wider range of applications than before. What is KHK certified? KHK certified products are those that have passed the high-pressure gas equipment testing conducted by the High-Pressure Gas Safety Association (KHK), and they come with a certificate of test results for high-pressure gas equipment. Benefits of KHK certified products: High-pressure gas equipment requires administrative procedures such as permission applications, inspection applications, and notifications to the governor of the prefecture (or the mayor of the municipality). These administrative procedures involve the preparation of necessary documents and complex procedures such as equipment testing, but by simply submitting the certificate of test results for high-pressure gas equipment issued by KHK, the administrative procedures can be completed.