An article I wrote has been published in the December issue of "Measurement Technology" by Nippon Kogyo Shuppan.

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The December issue of Japan Industrial Publishing's "Measurement Technology" introduces the product overview of the new MEMS Pirani vacuum gauge, the VersaTorr series, along with examples of its applications in advanced semiconductor processes.

MEMS Pirani Vacuum Gauge "VersaTorr Series"

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Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>
Thin films, coatings, and surface treatments cover a wide range of industries and applications!

【Lineup】 ■ Mass Flow Controllers for Gases and Liquids - SLA5800 Series IP40 - General-purpose Mass Flow - GF40 Series Compact Mass Flow - GF100 Series High Purity Mass Flow - Quantim Coriolis Mass Flow ■ Vacuum and Pressure Measurement and Control - XacTorr Series Capacitance Manometers - VersaTorr Series Pirani Vacuum Transducers - SolidSense II Pressure Transducer - SLA Series Pressure Controllers *For more details, please refer to the PDF materials or feel free to contact us.