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★Short delivery time compatible products★ "Mass Flow Controller/ Meter" #GF40 ・ "Thermal Mass Flow Controller/ Meter" #SLA5800

ITWジャパン

ITWジャパン

The GF40 series is a mass flow controller/meter equipped with our proprietary MultiFlo technology. This feature allows for changes to be made to thousands of different specifications using the dedicated software, Brooks Expert Support Tool (BEST), based on the gas type and full scale at the time of purchase. The SLA5800 series is a model capable of providing stable flow control from low flow rates (3 sccm) to high flow rates (2500 slpm). By using our dedicated software (BEST: Brooks Expert Support Tool), customers can modify PID constants suitable for their processes and monitor various data (alarms, valve openings, etc.). This data can also be utilized for troubleshooting, contributing to the reduction of equipment downtime. ★ A paid dedicated cable is required to connect the SLA5800 series/GF40 with the dedicated software. The Brooks Expert Support Tool (BEST) can be used free of charge, except for some features.

Multiflo Mass Flow Controller/ Meter "GF40 Series"
Thermal Mass Flow Controller/ Meter "SLA5800 Series"

Related Links

[Product Information] Multiflo Mass Flow Controller/ Meter 'GF40 Series' [Product Information] Thermal Mass Flow Controller/ Meter 'SLA5800 Series'

Related catalog

Thermal Mass Flow Controller / Mass Flow Meter "GF40"

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[Instruction Manual] Thermal Mass Flow 'SLA5800 Series'

MANUAL