<Application Information> Accurate and stable supply of gas and liquid for titanium nitride coating.

ITWジャパン

Titanium is frequently used in such applications to form a very hard titanium nitride (TiN) coating on the target products. Titanium coatings are often used for decorative purposes on jewelry, household appliances, and automotive trim due to their golden appearance. Similar coatings may also be used on the surfaces of medical devices and instruments as non-toxic options. This type of coating is now being applied in advanced biomedical devices, including in vivo biosensors. The coating of titanium nitride generally employs the CVD process. In this process, multiple chemicals (TiCl4, N2, H2) are supplied to a furnace and reacted at high temperatures to produce titanium nitride, which is then deposited on the surface as a coating. It is crucial for the integrity, appropriate thickness, and uniformity of the coating to accurately deliver these materials to the furnace.

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