Product Information: Steam Supply Module "VDM300"

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"Achieving the highest flow accuracy in ultra-high purity DI steam supply" The Vapor Delivery Module (VDM) features an energy-efficient design that generates ultra-high purity vaporized gas even at low temperatures. It employs proven steam delivery technology and is equipped with advanced digital control and comprehensive diagnostic functions. Compared to flash vaporization systems, it achieves superior accuracy, high flow rates, a wide control range, and low power consumption. Based on proven thermal mass flow measurement technology, it generates steam even in non-heated conditions, eliminating the influence of pure water, thus ensuring high reliability and high purity manufacturing. An independent service port and intuitive GUI provide user-friendly data logging and diagnostic capabilities. Applications: ■ Post-process for metal etching of silicon semiconductors ■ Metal strip process for silicon semiconductors ■ Ultra-high purity humidification in low atmospheric pressure environments For more details, please visit https://www.brooksinstrument.com/ja-jp/products/vaporization/vapor-delivery-modules/vdm300

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Steam Supply Module "VDM300"
Achieving the highest flow accuracy in ultra-high purity DI steam supply.

【Features】 ■Flow range: 3 slpm (DIW steam) ■Direct steam measurement achieving excellent flow accuracy ■Directly connects to pure water supply systems within the plant ■Operates even at the lowest temperature (non-superheated state) ■Optimally designed for washing and drainage ■EtherCAT digital communication ■Brooks Expert Support Tool (BEST) graphical interface *For more details, please download the PDF or feel free to contact us.
Service & Support
Reliable products, highly specialized services! We restore equipment to "like-new condition"!

【Standard Factory Services】 ■Calibration - Recalibration is performed using standard methods and equipment used in the manufacturing process. ■Specification Changes - Modifications are made to repurpose existing equipment for new applications. ■Repair - Restoration of malfunctioning equipment to "like-new condition." ■Upgrade - Upgrading to more advanced digital protocols and equipping older models with features of new models. *For more details, please refer to the PDF document or feel free to contact us.