【Product Information】Metal Seal Mass Flow Controller/ Meter 'GF100 Series'

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Model GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121 / GF125 / GF126 "Achieving high purity and ultra-high purity process gas supply with excellent response speed and repeatability" The GF100 series, designed for semiconductor, MOCVD, and other gas flow control applications, ensures high repeatability and stable performance, providing reliability that exceeds industry standards. With standard MultiFlo(TM) technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. It achieves industry-leading gas cleanliness while enhancing process flexibility and efficiency, maximizing yield and productivity. Applications ■ Semiconductor etching tools ■ Thin film chemical vapor deposition (CVD) systems (CVD, MOCVD, PECVD, ALD) ■ Physical vapor deposition (PVD) systems ■ Epitaxial process systems

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Metal Seal Mass Flow Controller/ Meter "GF100 Series"
Applications for gas flow control with excellent response speed and repeatability.

**Merits** - High-performance components that execute continuous testing in accordance with semiconductor industry standards - Reduced dry-down time during purging - Ability to set new process gases and/or ranges in under 60 seconds - Support for unexpected replacement or upgrades of metal seal MFCs, including brands - Convenient user display and independent diagnostic/service port, etc. *For more details, please download the PDF or feel free to contact us.*
Service & Support
Reliable products, highly specialized services! We restore equipment to "like-new condition"!

【Standard Factory Services】 ■Calibration - Recalibration is performed using standard methods and equipment used in the manufacturing process. ■Specification Changes - Modifications are made to repurpose existing equipment for new applications. ■Repair - Restoration of malfunctioning equipment to "like-new condition." ■Upgrade - Upgrading to more advanced digital protocols and equipping older models with features of new models. *For more details, please refer to the PDF document or feel free to contact us.