[Product Catalog] 'GP200 Series' Pressure-Based Gas Mass Flow Controller (Revised Edition)

ITWジャパン

The GP200 series is the first fully pressure-independent PMFC designed specifically for semiconductor applications. With GP200's unique differential pressure technology and state-of-the-art sensor and valve configuration, it eliminates the limitations of traditional pressure-based mass flow controllers, enabling the most extensive and accurate process gas control in the industry. Brooks developed the world's first MFC that allows for the reconfiguration of gas types and flow ranges, and has continued to refresh gas models since its release, with the same functionality incorporated into the GP200. It allows for easy reconfiguration for many gas types and a wide range of flow rates, providing flexible support for a variety of processes. The ultra-fast and highly reproducible valve control of the GP200, along with its resistance to pressure fluctuations, maintains precise flow control to the chamber even in cases of extreme supply pressure variations, enabling tighter process control. The GP200 platform supports a wide range of process conditions and can replace or upgrade many traditional pressure-based mass flow controllers.

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Pressure-based mass flow controller "GP200 series"
Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

For more details, please contact us.
Thermal Mass Flow Controller/ Meter "SLA5800 Series"
Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

<Benefits of KHK Certified Products> High-pressure gas equipment requires administrative procedures such as permission applications, inspection applications, and notifications to the governor of the prefecture (or the mayor of the municipality). These administrative procedures involve the preparation of necessary documents and complicated procedures such as equipment testing. However, by simply submitting the high-pressure gas equipment test performance certificate issued by KHK, the administrative procedures can be completed.
Service & Support
Reliable products, highly specialized services! We restore equipment to "like-new condition"!

【Standard Factory Services】 ■Calibration - Recalibration is performed using standard methods and equipment used in the manufacturing process. ■Specification Changes - Modifications are made to repurpose existing equipment for new applications. ■Repair - Restoration of malfunctioning equipment to "like-new condition." ■Upgrade - Upgrading to more advanced digital protocols and equipping older models with features of new models. *For more details, please refer to the PDF document or feel free to contact us.