Released the VDM300 Deionized Water Vapor Delivery Module.

ITWジャパン

The VDM300, designed for advanced stripping and passivation processes after metal etching, achieves superior accuracy, high flow rates, a wide control range, and low power consumption compared to flash vaporization systems. Features of the VDM300: 1. Flow range: 3 slpm (DIW vapor) 2. Direct steam measurement for excellent flow accuracy 3. Direct connection to the plant's pure water supply system 4. Operable even at minimum temperature (non-heated state) 5. Optimally designed for rinsing and drainage 6. EtherCAT digital communication 7. Brooks Expert Support Tool (BEST) graphical interface

VDM300 Deionized Water Vapor Delivery Module

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Related product information

Steam Supply Module "VDM300"
Achieving the highest flow accuracy in ultra-high purity DI steam supply.

【Features】 ■Flow range: 3 slpm (DIW steam) ■Direct steam measurement achieving excellent flow accuracy ■Directly connects to pure water supply systems within the plant ■Operates even at the lowest temperature (non-superheated state) ■Optimally designed for washing and drainage ■EtherCAT digital communication ■Brooks Expert Support Tool (BEST) graphical interface *For more details, please download the PDF or feel free to contact us.