[New Product] Introduction of the "GP200 Series" that maximizes the best performance.
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Latest Pressure-Based Mass Flow for Cutting-Edge Semiconductor Processes The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and positions the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. * By measuring differential pressure with a single sensor, flow accuracy and reproducibility are dramatically enhanced. * It accommodates a wide range of pressures, gas types, and processes. * Advanced valve architecture enables more accurate and reproducible flow control and responsiveness. * Zero-leak valves eliminate the "first wafer effect."
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Latest pressure-based mass flow for cutting-edge semiconductor processes
See how the unique design approach of GP200 Series extends the use of P-MFCs to CVD processes.
