Variable Area Flowmeters Reliable quality designed to world standards When measuring the flow of high-pressure or high-temperature liquids and gases that are not suitable for plastic, our robust "glass tube variable area flowmeter (rotameter)" allows for more accurate flow measurement. It offers a wider flow range and is suitable for various liquids and gases! Contents ■ Glass tube variable area flowmeters / Metal tube variable area flowmeter lineup ■ Custom design solutions ■ Accessories & replacement parts ■ Support for technical documentation and compliance with various regulatory requirements ■ Services and support, etc.

When measuring the flow rate of liquids or gases that are unsuitable for plastic due to high pressure or high temperature, our robust "glass tube variable area flow meter (rotameter)" allows for more accurate flow measurements. It offers a wider flow range and is suitable for various liquids and gases! 【Features】 ■ Glass tube variable area flow meter ・ Flow measurement technology with high durability, economy, and excellent operability ・ Capable of a wider flow range, suitable for various liquids and gases ■ Metal tube variable area flow meter ・ Durability and accuracy that withstands high pressure and harsh temperature environments 【Product Lineup】 ■ Glass tube variable area flow meter ・ Sho-Rate models 1350, 1355, 1358 ・ GT1600 series ■ Metal tube variable area flow meter ・ MT3750 series ・ MT3809 series ▼ For more details, visit https://www.brooksinstrument.com/ja-jp/products/variable-area-flow-meters

GT1000, GT1300, and Full-View(R) model successors "A simple yet robust design created to meet accuracy requirements" This is a robust glass tube area flow meter suitable for measuring flow rates from low to high, designed to provide long-term stable performance in applications involving gases and liquids where visibility of process fluids is necessary. The accuracy range can be optionally selected from 1% to 10% of full-scale flow. It is ideal for applications such as managing purge flow, seal oil units, bearing lubricants, and cooling water management. Additionally, when updating our GT1000, GT1300, and Full-View(R) 1100 series (models 1110, 1114, 1140, 1144), you can choose from model codes as compatible successors. Applications: ■ Industrial processes ■ Pharmaceutical manufacturing ■ Oil and gas pumping and refining processes ■ Chemical manufacturing ■ Burner control ■ Water treatment and supply systems

This is a glass tube area flow meter suitable for measuring flow rates from low to high, designed with a robust structure that ensures long-term stable performance for applications involving gases and liquids where visibility of the process fluid is necessary. We will explain this in a 1 minute and 31 seconds video. https://www.youtube.com/watch?v=BgZMdBY4kLM Contents of the recording: ■ Basic mechanism and applications ■ Features ■ Monitoring important flow conditions ■ Scale design (The easy-to-read scale design allows for accurate flow monitoring. It can be operated intuitively, requiring no training for use.)

In fields such as chemistry, petrochemicals, and pharmaceuticals, there is a demand for measurement and control devices that can operate stably over the long term in explosion-proof environments. The 'SLAMf series' handled by ITW Japan is a thermal mass flow controller/meter that has obtained domestic explosion-proof certification (JPEx). It supports a wide flow range of 0.003 to 20800 slpm, achieving both high precision and long-term zero point stability. It has a wealth of installation records in both domestic and international plants, as well as in manufacturing lines. Models: SLAMf50 / SLAMf51 / SLAMf53 / SLAMf60 / SLAMf61 / SLAMf63 / SLAMf64 Applications: ■ Pilot plants for petrochemicals and chemical gases ■ Life science bioreactors ■ Blanketing in food processing

Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.

Low-emissivity (Low-E) coated architectural glass has become one of the most popular functional building materials. It plays a crucial role in improving the energy efficiency and energy-saving properties of buildings by minimizing heat loss and internal condensation. The coating (thin film) applied to the glass controls the flow of visible light energy passing through the glass. This coating alters the characteristics of light transmission, reflection, and absorption in different parts of the electromagnetic spectrum, such as infrared, visible light, and ultraviolet. When viewed from inside the building, Low-E glass reflects energy back into the building, achieving significantly lower heat loss compared to regular glass. When viewed from outside the building, Low-E glass allows the visible portion of solar energy to pass through while minimizing the infrared portion, thereby reducing heat loss from the building.

The manufacturing processes and various evaluation devices for secondary battery materials, biotechnology, and surface treatment, as well as flow and pressure measurement instruments used in the EPC industry, must not only meet the appropriate functions and accuracy for their applications but also possess durability that allows for safe long-term use. At ITW Japan, we offer "flow and pressure measurement instruments" such as mass flow meters/controllers and pressure controllers for gases, as well as transducers that excel in long-term stability, "Coriolis flow meters" suitable for high-precision control and measurement of small liquid flows, "metal tube area flow meters" with a wealth of experience in the EPC industry, and "glass tube area flow meters" that are highly versatile and suitable for durability and cost-effectiveness. To ensure our products are used for a long time, we provide calibration and repair maintenance not only with domestic support but also at overseas locations. 【Examples of device applications】 Solar cell-related / Semiconductor-related / Medical device-related / Centrifuges / Filtration skids / Fermentation tanks / Various coatings / Fill & finish / Bioreactors (additive supply) and more ▼ Download the materials here 　https://www.ipros.jp/product/detail/2000744379

Model SLAMf50 / SLAMf51 / SLAMf53 / SLAMf60 / SLAMf61 / SLAMf63 / SLAMf64 "Durability to withstand harsh environments! Achieving excellent precision with precise mass flow control" Whether indoors or outdoors, in environments with dust or places that handle water, the 'SLAMf series' elastomer seal thermal mass flow controllers/meters provide proven high precision and long-term stability unique to the "SLA5800 family." Applications ■ Pilot plants for petrochemical and chemical gases ■ Life science bioreactors ■ Blanketing in food processing

Model SLA5850/SLA5851/SLA5853/SLA5860/SLA5861/SLA5863 "With just one unit, you can use 14 types of pressure and flow rates in a single process." Imagine such a mass flow controller platform. Moreover, it features excellent reproducibility, precision, and repeatability. This is the evolved simple performance of the SLA5800 series mass flow controllers/meters. The SLA5800 series boasts high accuracy, zero point stability, and repeatability that are characteristic of Brooks Instrument, a leader in mass flow measurement and control technology. Equipped with configurable advanced multi-gas/multi-range capabilities, it offers superior zero drift specifications compared to competing products while demonstrating long-term maintenance of factory calibration and accuracy.

Many people may have questions like, "What can be done with IoT?" and "What is needed?" upon hearing the term IoT. Through digital communication, it is possible to obtain various information such as flow sensors, valves, circuit boards, and abnormal monitoring that were not accessible with traditional analog control. For example, by monitoring the valve opening, one can detect blockages in the equipment and identify leaks from cumulative flow. This information directly contributes to reducing downtime and improving quality through continuous long-term monitoring and knowledge-based management. Compatible models include those with digital communication via RS485, in addition to traditional analog controls like 0-5VDC and 4-20mA. (Older models such as the 58xxS, MfxxS series, SLA58xxS, and SLAMfxxS series). Even older models that do not support digital communication can be upgraded to the latest mass flow models, enabling digital communication. The dimensions between new and old models are the same, and no wiring changes are necessary. Additionally, we can provide control boxes for data collection from mass flow. This enables a "visualization" of small IoT without making large changes to the equipment.

Brooks Instrument provides excellent meter reproducibility, enabling accurate measurement and control of complex industrial processes. We explain how to connect the 'MT3809 (metal tube variable area flow meter)' to a FOUNDATION Fieldbus transmitter in a video. (In English) https://www.youtube.com/watch?v=KOgdtYaxHjc Video Chapters 00:00 How to connect to a FOUNDATION Fieldbus network 00:39 Removing the terminal block 00:57 How to connect the wiring 02:20 Conduit connection 02:45 How to install the housing For more information about our metal tube variable area flow meters, please visit: https://www.brooksinstrument.com/ja-jp/products/variable-area-flow-meters/metal-tube/mt3809-series

"Maximizing the Best Performance" This is the industry's first fully pressure-insensitive type of pressure-based mass flow controller (P-MFC) specifically designed for advanced etching and deposition processes in semiconductor manufacturing. The GP200 series P-MFC adopts a patented architecture that overcomes the limitations of conventional P-MFCs, enabling high-precision process gas supply even with low vapor pressure process gases. It also features a built-in differential pressure sensor and a unique design that places the valve downstream, allowing for high-precision process gas supply across the widest range of operating conditions in the industry. Due to its compatibility with a wide range of process conditions, it can be used as a replacement or upgrade for conventional P-MFCs and thermal MFCs. Additionally, by eliminating the need for components such as pressure regulators and converters, it simplifies the gas supply system and reduces costs. [Main Applications] ■ Semiconductor Manufacturing ■ Etching ■ CVD ■ Gas flow control applications requiring high-purity all-metal flow paths

We explain the operating principle of the GP200 series metal seal type pressure-based mass flow meter (P-MFC) in a video. (English) https://www.youtube.com/watch?v=ZWB03A_9fo8 Video Chapters 00:00 - What is Brooks Instrument? 01:00 - What is a conventional pressure-based MFC? 02:10 - Introduction to the GP200 pressure-based MFC 03:30 - Advantages of the GP200 MFC 03:50 - Pressure measurement method of the GP200 MFC 04:45 - Superiority of the GP200 This pressure-based mass flow meter adopts a unique design that overcomes the limitations of conventional pressure-based MFCs and significantly improves process performance.

The operating principles of the SLA series are explained in the video. (English) https://www.youtube.com/watch?v=XKpX3rrt1qc Video Chapters 00:00 What is Brooks Instrument? 00:10 How to connect power to the thermal mass flow meter 00:24 Basic structure of the thermal mass flow meter 00:35 Diverting a portion of the gas flow with a laminar flow element 00:56 Measuring temperature difference with thermal sensors 01:08 Excellent sensor stability 01:37 How to measure process gas flow 02:17 Circuit board of the thermal mass flow meter 02:34 What are advanced alarm and diagnostic functions? <Main advantages of Coriolis flow meters> ■ Long-term stability of the sensor eliminates the need for maintenance or regular recalibration, reducing total ownership costs ■ Brooks Instrument's unique thermal sensor technology improves the S/N ratio and enhances flow accuracy at low set points.

The operating principle adopted in the Quantim QMC Coriolis flow meter (3rd generation) is explained in a video. (English) https://www.youtube.com/watch?v=_BXWlSn3Q_I Video Chapters 00:00 About Brooks Instrument 00:16 Operating principle of the Coriolis mass flow meter 00:27 Law of conservation of momentum 00:40 Law of conservation of angular momentum 00:52 Basic structure of the Coriolis mass flow meter 01:07 How to power on 01:23 Sensor structure boasting high stability 01:40 Sensor tube vibrating at natural frequency 02:14 Phase difference detection of the sensor tube 02:59 Signal processing by electronic circuits 03:08 Method of measuring process flow 03:47 Role of the circuit board 03:58 What advanced alarm and diagnostic functions are 04:22 About calibration <Main advantages of the Coriolis flow meter> ■ Improves process quality, yield, and productivity ■ Reduces scale-up time from laboratory to pilot plant and then to manufacturing line ■ Reduces total cost of ownership (TCO)

The new Quantim QMC Coriolis flow meter (3rd generation) is ideal for applications involving the measurement and control of minute flows of gases and liquids. The Quantim® QMC Coriolis mass flow controllers and meters provide extremely accurate, stable, and reproducible measurements and control for minute flows of gases and liquids. This new 3rd generation Quantim QMC Coriolis mass flow controller and meter contributes to shortening the scale-up period from lab to pilot plant to production by enhancing process quality, production yield, and throughput. The new Quantim QMC Coriolis mass flow series is compatible in terms of mounting dimensions and functionality with the old models of Quantim from Brooks Instrument. Applications: ■ Catalyst research ■ Mass balance calculations in chemical pilot plants ■ Precursors supply to vaporization units ■ Precision coating ■ High-accuracy filling stations ■ Feedback/control loops for metering pumps ■ Vacuum processes ■ Semiconductor wafer processes

Model GF100 / GF101 / GF120 / GF120XSL / GF120XSD / GF121 / GF125 / GF126 "Achieving high purity and ultra-high purity process gas supply with excellent response speed and repeatability" The GF100 series, designed for semiconductor, MOCVD, and other gas flow control applications, ensures high repeatability and stable performance, providing reliability that exceeds industry standards. With standard MultiFlo(TM) technology, it supports thousands of combinations of gas types and ranges without disconnecting from the gas line or sacrificing accuracy. It achieves industry-leading gas cleanliness while enhancing process flexibility and efficiency, maximizing yield and productivity. Applications ■ Semiconductor etching tools ■ Thin film chemical vapor deposition (CVD) systems (CVD, MOCVD, PECVD, ALD) ■ Physical vapor deposition (PVD) systems ■ Epitaxial process systems

【New Product Information】 Coriolis Mass Flow Controller/ Meter 'QMC Series' GF120xHT Series Metal Seal Specification 'High-Temperature Mass Flow Controller' ★Please check the features in the 【Panel Materials】! We also offer online briefings. If you are interested, please feel free to contact us. https://www.brooksinstrument.com/ja-jp/about-us/contact

■ Wide flow range/pressure conditions and support for digital I/O ■ Certificates and certifications ■ Applications Please take a look here. https://www.ipros.jp/catalog/detail/752600 You can also view it from related catalogs.

Hot melt extrusion (HME) is a method that involves melting polymers by applying heat and pressure, and extruding them into molds in a continuous process. HME is widely used in the plastics industry and has recently been applied to pharmaceutical formulations and drug delivery systems. The HME process is used to mix active pharmaceutical ingredients (APIs) with polymers and other excipients at high temperatures and pressures. The extruded material can be cut or ground into micro-pellets for filling into capsules or compressing into tablets. ☆Application note now available☆ "Enhancing Drug Delivery Systems through High-Precision Measurement and Control of Supercritical CO2 Using Coriolis Mass Flow Meters" For more details, visit here https://www.brooksinstrument.com/ja-jp/blog/highly-reliable-accurate-coriolis-flow-meter-for-carbon-dioxide-injection [ITW Japan Co., Ltd. Brooks Instrument]

A world where miniaturization and high performance are progressing daily. Mobile phones now have features that were unimaginable just a few years ago. This high performance has been made possible thanks to thin film technology, which is utilized in a wide range of applications as listed below. 【Applications of Thin Film Technology】 - Microelectronics - Anti-reflective coatings for glass - Antibacterial metal coatings for medical devices - Flexible solar cells Thin film technology is defined as "the process of creating, coating, and processing thin film materials on a substrate surface." 【PVD and CVD Technologies】 - What is PVD? - What is CVD? - What is Thermal Filament CVD? - What is Plasma CVD? - CVD Process - Range of CVD Applications - Battery Market - Thin Film Technology Used in the Battery Market Please take a moment to read it. https://mono.ipros.com/news/detail/129945/

We will introduce a comparison of CVD and PVD, applications of flow meters and pressure gauges, and examples of digitalization in process control. In a world where miniaturization and high performance are advancing daily, mobile phones now have features that were unimaginable just a few years ago. The realization of such high performance is thanks to thin film technology, which is utilized in a wide range of applications such as the following: 【Applications of Thin Film Technology】 - Microelectronics - Anti-reflective coatings for glass - Antibacterial metal coatings for medical devices - Flexible solar cells Thin film technology is defined as "the process of creating, coating, and processing thin film materials on a substrate surface." We will provide explanations of thin film technology, comparisons of CVD and PVD, applications of flow meters and pressure gauges, and examples of digitalization in process control. We encourage you to read on. ★ We also offer foundational knowledge that delves deeper into the explanations of CVD and PVD, as well as basic knowledge materials related to glass coatings for the glass industry! https://mono.ipros.com/news/detail/128269/

Titanium is frequently used in such applications to form a very hard titanium nitride (TiN) coating on the target products. Titanium coatings are often used for decorative purposes on jewelry, household appliances, and automotive trim due to their golden appearance. Similar coatings may also be used on the surfaces of medical devices and instruments as non-toxic options. This type of coating is now being applied in advanced biomedical devices, including in vivo biosensors. The coating of titanium nitride generally employs the CVD process. In this process, multiple chemicals (TiCl4, N2, H2) are supplied to a furnace and reacted at high temperatures to produce titanium nitride, which is then deposited on the surface as a coating. It is crucial for the integrity, appropriate thickness, and uniformity of the coating to accurately deliver these materials to the furnace.

The Pirani vacuum gauge "VersaTorr Series" features the BVT100 series with a dual sensor system combining diaphragm and MEMS Pirani types, and the BVT200 series with a triple sensor that integrates a capacitance manometer for wider range measurements. The newly developed MEMS Pirani sensor enables wide-range measurements down to 7.5 x 10E-7 Torr, which is one order of magnitude lower than typical MEMS Pirani sensors. By covering the high-pressure range of 1.5 to 1000 Torr, where the Pirani sensor is affected by gas thermal losses, with a diaphragm type, it allows for wide-range measurements from 7.5 x 10E-7 to 1000 Torr. For more detailed information, please visit the following website (English version): https://www.brooksinstrument.com/en/products/pressure-vacuum/pirani-transducers

"MFC equipped with PTI (Pressure Variation Resistance)" The 'GF125 series,' featuring ultra-fast response and high cleanliness, is a metal-sealed mass flow controller equipped with second-generation PTI (Pressure Variation Resistance). It significantly reduces the impact of inlet pressure fluctuations on process gas flow rates. The MultiFlo technology, standard in the GF125, allows for thousands of combinations of gas types and ranges without disconnecting the flow meter from the gas line or compromising accuracy. This feature contributes to reducing the size and cost of gas panels by reviewing pressure regulators, pressure transducers, and related hardware installed in the process line, alongside industry-leading PTI performance that maximizes yield and productivity. Applications: ■ Semiconductor etching tools ■ MOCVD ■ Gas flow control applications requiring high-purity all-metal flow paths

The Brooks Expert Support Tool 'BEST (Brooks Enhanced Support Tool)' is a Windows-based application software designed to control high-performance mass flow controllers, meters, and pressure controllers specifically for the SLA58XX and SLAMfXX series. By using this tool, you can utilize functions including setup, configuration, diagnostics, troubleshooting, valve adjustment, and calibration (a separate license key is required). You can access the diagnostic port located at the top of the device by connecting it to your computer with a dedicated cable. For specifications, licensing requirements, and operation methods, please contact us. Please check the following page for compatible products: https://www.brooksinstrument.com/ja-jp/products/accessories-software/product-software/brooks-expert-support-tool ■ Currently available versions V5.14.1.0 V5.12.0.0 V5.10.0.0

Model GF40 "One device supports various gases and flow rates" The ability to accommodate multiple gases with a single device maximizes process flexibility and productivity. The GF40 series elastomer-sealed mass flow controllers/meters, equipped with Brooks Instrument's proprietary MultiFlo technology, are ideal for systems, processes, and facilities that use diverse gases, frequently change gas types, or need to recalibrate ranges while maintaining measurement and control accuracy. With unprecedented flow measurement and control performance, it elevates process flexibility to a new dimension. Applications ■ Solar cell CVD (Chemical Vapor Deposition) systems ■ Life science bioreactors ■ Vacuum processes ■ Nanotechnology/MEMS manufacturing ■ Plasma, glass, web coating systems ■ Options for manifold/gas supply systems

Surfaces of industrial and consumer products may be coated to optimize their finish. For example, it is possible to improve the wear resistance of cutting tools, scratch resistance of glass, thermal properties of sheet glass, and aesthetics of household appliances. There are various coating methods such as chemical vapor deposition, physical vapor deposition, plasma treatment processes, and thermal spraying, but they are often performed as the final stage of the manufacturing process. Brooks Instrument's mass flow, vacuum, and pressure measurement and control devices cover PVD and CVD process applications. They are also suitable for surface treatment applications such as heat treatment and plasma processing. 【Features】 ■ Highly reproducible, high-precision gas supply ■ Excellent quality, accurate thickness, uniformity of film thickness ■ Long-term stable process control ■ High-functionality flow diagnostics and trend analysis in the field to maximize process yield

"Achieving the highest flow accuracy in ultra-high purity DI steam supply" The Vapor Delivery Module (VDM) features an energy-efficient design that generates ultra-high purity vaporized gas even at low temperatures. It employs proven steam delivery technology and is equipped with advanced digital control and comprehensive diagnostic functions. Compared to flash vaporization systems, it achieves superior accuracy, high flow rates, a wide control range, and low power consumption. Based on proven thermal mass flow measurement technology, it generates steam even in non-heated conditions, eliminating the influence of pure water, thus ensuring high reliability and high purity manufacturing. An independent service port and intuitive GUI provide user-friendly data logging and diagnostic capabilities. Applications: ■ Post-process for metal etching of silicon semiconductors ■ Metal strip process for silicon semiconductors ■ Ultra-high purity humidification in low atmospheric pressure environments For more details, please visit https://www.brooksinstrument.com/ja-jp/products/vaporization/vapor-delivery-modules/vdm300