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Solutions that support a sustainable future

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Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

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A wide range of products with excellent durability is available. We also offer repair and maintenance services. We provide materials introducing our approach to the bio, EPC, and thin film industries.

【Examples of Device Applications】 ◎ Solar cell related ◎ Semiconductor related ◎ Medical device related ◎ Centrifuge ◎ Filtration skid ◎ Fermentation tank ◎ Various coatings ◎ Fill & finish ◎ Bioreactor (additive supply) etc. *For more details, please refer to the PDF document or feel free to contact us.

The new 3rd generation Quantim QMC Coriolis flow meter is suitable for applications involving the measurement and control of small flow rates of gases and liquids.

【Other Features】 ■ There is no need to change or recalibrate the measurement system each time the composition or conditions of the process are altered. ■ The all-stainless steel Quantim QMC is suitable for a wide range of process fluids. ■ It is equipped with a service port that allows access from a 2.5mm jack plug to the QMC main unit, and when combined with the Brooks Expert Support Tool (BEST) software, which is available for free download, it enables the use of built-in alarms and diagnostic functions to enhance process monitoring and predictive maintenance. These features not only simplify installation at the site but also support troubleshooting and calibration. * For more details, please refer to the related link page or feel free to contact us.

Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

<Benefits of KHK Certified Products> High-pressure gas equipment requires administrative procedures such as permission applications, inspection applications, and notifications to the governor of the prefecture (or the mayor of the municipality). These administrative procedures involve the preparation of necessary documents and complicated procedures such as equipment testing. However, by simply submitting the high-pressure gas equipment test performance certificate issued by KHK, the administrative procedures can be completed.

Introducing cost-effective gas flow measurement for targeted applications!

【Other Features】 ■ Mass flow measurement - No need for temperature or pressure compensation ■ Compatible with most applications ■ High durability stainless steel structure with no moving parts, offering high corrosion resistance and long-term stability ■ Compatible with most process/test gases ■ Simple and cost-effective installation ■ Flow display, trend display, and total display via electronic output signals ■ First choice for upgrading from area flow meters *For more details, please refer to the related links page or feel free to contact us.

Proven long-term stability! We provide ultra-high purification performance for high-temperature applications.

【Other Features】 ■ Closed valve during normal operation (option for open valve during normal operation is also available) ■ Electric valve override ■ Low command flow cutoff ■ "Valve Off" function compliant with TTL *For more details, please refer to the related link page or feel free to contact us.

Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

【Other Features】 ■ Achieves high process accuracy and control even under harsh conditions due to the highly durable device housing. ■ Improves the S/N ratio at low set points with unique thermal sensor technology. ■ Long-term stability of the sensor eliminates the need for maintenance or regular recalibration. ■ Up to six calibration programs can be accommodated with a single device. ■ Equipped with an easily accessible service port to simplify installation, troubleshooting, and diagnostic tasks. ■ High precision is achieved through high-performance measurement systems and calibration based on global standards. ■ Streamlines integration into existing systems with several types of protocol communication interfaces. *For more details, please refer to the related link page or feel free to contact us.

Ultra-fast response for flow processes focused on speed! Suitable for a wide variety of non-corrosive gases.

【Other Features】 ■ Suitable for a wide variety of non-corrosive gases ■ Fast response time ensures quick steps even during process recipe changes ■ Suitable for OEMs ■ Various communication options that can be tailored to user requirements *For more details, please refer to the related link page or feel free to contact us.

Excellent long-term stability, maintaining production accuracy! We perform highly reliable, precise, and repeatable measurements and controls.

【Other Features】 ■ Proven long-term stability and accuracy across a wide range of processes and applications ■ Provides excellent return on investment through reliable performance ■ Removable flow sensor that does not require continuous monitoring and gas pressure adjustment ■ Easy installation and servicing with dedicated analog input/output *For more details, please refer to the related link page or feel free to contact us.

Mass flow controller/meters that support multiple gases with a single device. A compact readout unit that can connect up to four devices is also introduced.

【Other Features】 ◎ 'GF40 Series' ■ The sensor material is Hastelloy, ensuring long-term stability in flow measurement and a long lifespan for the equipment. ◎ '0254' ■ It is possible to individually set the voltage and current for analog I/O for each channel. ■ Can be used in combination with other products from our company besides 'GF40'. ■ A single unit version '0251' is also available for proposal. *For more details, please refer to the materials. Feel free to contact us with any inquiries.

MFC that makes everything possible

**Merits** - High-performance components that execute continuous testing in accordance with semiconductor industry standards - Reduced dry-down time during purging - New process gases and/or ranges can be set in under 60 seconds - Supports unexpected replacement or upgrade of metal seal MFCs, including brands - Convenient user display and independent diagnostic/service port, etc. *For more details, please download the PDF or feel free to contact us.*

Thin films, coatings, and surface treatments cover a wide range of industries and applications!

【Lineup】 ■ Mass Flow Controllers for Gases and Liquids - SLA5800 Series IP40 - General-purpose Mass Flow - GF40 Series Compact Mass Flow - GF100 Series High Purity Mass Flow - Quantim Coriolis Mass Flow ■ Vacuum and Pressure Measurement and Control - XacTorr Series Capacitance Manometers - VersaTorr Series Pirani Vacuum Transducers - SolidSense II Pressure Transducer - SLA Series Pressure Controllers *For more details, please refer to the PDF materials or feel free to contact us.

We have over 70 years of global experience in more than 80 countries!

【Other Features】 <MT3750 Series Metal Tube Area Flow Meter> ■ Used for small flow applications handling high-pressure or hazardous fluids ■ Compact design ■ 4-20 mA output signal ■ Suitable for upgrading from glass tube area flow meters <GT1600 Series Glass Tube Area Flow Meter> ■ Can replace GT1000, GT130x, and Full-View models ■ Uses high-quality materials to ensure safety and durability indoors and outdoors ■ Easy to read with transparent scales ■ Indicator surface is secured with a polycarbonate shield for safety *For more details, please refer to the PDF document or feel free to contact us.

Automate pressure control and use it as a pressure/back pressure regulator!

**Features** - Full-scale flow: Up to 50 lpm - Maximum pressure: 30 MPa - Reduces leaks with superior valve technology and maximizes turndown - The SLA5840 with a remote transducer combines the advantages of pressure control and flow measurement - Durable metal top cover to prevent damage during installation - Equipped with a diagnostic/service port that is easily accessible in the device's installation environment - A wide range of communication options, including analog and digital interfaces

The lineup also includes Coriolis mass flow meters and our company's first pressure-based mass flow controllers.

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Reliable products, highly specialized services! We restore equipment to "like-new condition"!

【Standard Factory Services】 ■Calibration - Recalibration is performed using standard methods and equipment used in the manufacturing process. ■Specification Changes - Modifications are made to repurpose existing equipment for new applications. ■Repair - Restoration of malfunctioning equipment to "like-new condition." ■Upgrade - Upgrading to more advanced digital protocols and equipping older models with features of new models. *For more details, please refer to the PDF document or feel free to contact us.