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Applications for gas flow control with excellent response speed and repeatability.

**Merits** - High-performance components that execute continuous testing in accordance with semiconductor industry standards - Reduced dry-down time during purging - Ability to set new process gases and/or ranges in under 60 seconds - Support for unexpected replacement or upgrades of metal seal MFCs, including brands - Convenient user display and independent diagnostic/service port, etc. *For more details, please download the PDF or feel free to contact us.*

MFC that makes everything possible

**Merits** - High-performance components that execute continuous testing in accordance with semiconductor industry standards - Reduced dry-down time during purging - New process gases and/or ranges can be set in under 60 seconds - Supports unexpected replacement or upgrade of metal seal MFCs, including brands - Convenient user display and independent diagnostic/service port, etc. *For more details, please download the PDF or feel free to contact us.*

Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

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Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

<Benefits of KHK Certified Products> High-pressure gas equipment requires administrative procedures such as permission applications, inspection applications, and notifications to the governor of the prefecture (or the mayor of the municipality). These administrative procedures involve the preparation of necessary documents and complicated procedures such as equipment testing. However, by simply submitting the high-pressure gas equipment test performance certificate issued by KHK, the administrative procedures can be completed.

The new 3rd generation Quantim QMC Coriolis flow meter is suitable for applications involving the measurement and control of small flow rates of gases and liquids.

【Other Features】 ■ There is no need to change or recalibrate the measurement system each time the composition or conditions of the process are altered. ■ The all-stainless steel Quantim QMC is suitable for a wide range of process fluids. ■ It is equipped with a service port that allows access from a 2.5mm jack plug to the QMC main unit, and when combined with the Brooks Expert Support Tool (BEST) software, which is available for free download, it enables the use of built-in alarms and diagnostic functions to enhance process monitoring and predictive maintenance. These features not only simplify installation at the site but also support troubleshooting and calibration. * For more details, please refer to the related link page or feel free to contact us.

Achieving the highest flow accuracy in ultra-high purity DI steam supply.

【Features】 ■Flow range: 3 slpm (DIW steam) ■Direct steam measurement achieving excellent flow accuracy ■Directly connects to pure water supply systems within the plant ■Operates even at the lowest temperature (non-superheated state) ■Optimally designed for washing and drainage ■EtherCAT digital communication ■Brooks Expert Support Tool (BEST) graphical interface *For more details, please download the PDF or feel free to contact us.