Product Information: Pressure-Based Metal Seal Mass Flow Controller 'GP200 Series'

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"Maximizing the Best Performance" This is the industry's first fully pressure-insensitive type of pressure-based mass flow controller (P-MFC) specifically designed for advanced etching and deposition processes in semiconductor manufacturing. The GP200 series P-MFC adopts a patented architecture that overcomes the limitations of conventional P-MFCs, enabling high-precision process gas supply even with low vapor pressure process gases. It also features a built-in differential pressure sensor and a unique design that places the valve downstream, allowing for high-precision process gas supply across the widest range of operating conditions in the industry. Due to its compatibility with a wide range of process conditions, it can be used as a replacement or upgrade for conventional P-MFCs and thermal MFCs. Additionally, by eliminating the need for components such as pressure regulators and converters, it simplifies the gas supply system and reduces costs. [Main Applications] ■ Semiconductor Manufacturing ■ Etching ■ CVD ■ Gas flow control applications requiring high-purity all-metal flow paths

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Pressure-based mass flow controller "GP200 series"
Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.

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Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).

<Benefits of KHK Certified Products> High-pressure gas equipment requires administrative procedures such as permission applications, inspection applications, and notifications to the governor of the prefecture (or the mayor of the municipality). These administrative procedures involve the preparation of necessary documents and complicated procedures such as equipment testing. However, by simply submitting the high-pressure gas equipment test performance certificate issued by KHK, the administrative procedures can be completed.
Flow, pressure, steam, and vacuum products "Comprehensive Catalog" *Includes flow meters and more!
The lineup also includes Coriolis mass flow meters and our company's first pressure-based mass flow controllers.

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Service & Support
Reliable products, highly specialized services! We restore equipment to "like-new condition"!

【Standard Factory Services】 ■Calibration - Recalibration is performed using standard methods and equipment used in the manufacturing process. ■Specification Changes - Modifications are made to repurpose existing equipment for new applications. ■Repair - Restoration of malfunctioning equipment to "like-new condition." ■Upgrade - Upgrading to more advanced digital protocols and equipping older models with features of new models. *For more details, please refer to the PDF document or feel free to contact us.