Brooks Instrument provides support for all mass flow devices previously sold by various manufacturers, including Tylan General, Mykrolis, Entegris, UNIT, Kinetics, and Celerity, as shown in the "Brooks MFC Genealogy Chart" on the right. This accounts for approximately 80% of the legacy mass flow devices in the market. In response to customer requests, we may suggest repairs in some cases, and in others, we may recommend replacement with our best-selling mass flow devices, the GF120 or GF125. We have already replaced over 20,000 units from these legacy devices to the GF series. It is possible to replace nearly all models of legacy mass flow devices featured in the "Brooks MFC Genealogy Chart." If you are having trouble with repairs or replacements of legacy mass flow devices, please feel free to consult our sales department.

The latest support software is BEST (Brooks Enhanced Support Tool), and we have released the latest version 5.4.0.0. Some features, such as flow calibration with the reference device, require a paid license, and connection cables are also available for purchase. Customers who are not yet using Brooks' support software are encouraged to consider using BEST at this opportunity. By using the support software, we provide various functions and advantages that are not possible with mass flow alone. ■ Mass flow adjustment: Zero point and valve response adjustment (PID tuning) ■ Setting changes: Alarm settings, input/output settings ■ Control and monitor: Saving and restoring mass flow configuration files ■ Various diagnostic functions: Checking various error information that cannot be determined by the blinking of the device's LED ■ Simple operation: Control of flow and valve opening from the software ■ Paid optional features: Flow calibration with the reference device, support for terminal commands Please contact us for specifications, licensing requirements, and operating instructions.