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MFC that makes everything possible

**Merits** - High-performance components that execute continuous testing in accordance with semiconductor industry standards - Reduced dry-down time during purging - New process gases and/or ranges can be set in under 60 seconds - Supports unexpected replacement or upgrade of metal seal MFCs, including brands - Convenient user display and independent diagnostic/service port, etc. *For more details, please download the PDF or feel free to contact us.*

Achieving the highest flow accuracy in ultra-high purity DI steam supply.

【Features】 ■Flow range: 3 slpm (DIW steam) ■Direct steam measurement achieving excellent flow accuracy ■Directly connects to pure water supply systems within the plant ■Operates even at the lowest temperature (non-superheated state) ■Optimally designed for washing and drainage ■EtherCAT digital communication ■Brooks Expert Support Tool (BEST) graphical interface *For more details, please download the PDF or feel free to contact us.

The new 3rd generation Quantim QMC Coriolis flow meter is suitable for applications involving the measurement and control of small flow rates of gases and liquids.

【Other Features】 ■ There is no need to change or recalibrate the measurement system each time the composition or conditions of the process are altered. ■ The all-stainless steel Quantim QMC is suitable for a wide range of process fluids. ■ It is equipped with a service port that allows access from a 2.5mm jack plug to the QMC main unit, and when combined with the Brooks Expert Support Tool (BEST) software, which is available for free download, it enables the use of built-in alarms and diagnostic functions to enhance process monitoring and predictive maintenance. These features not only simplify installation at the site but also support troubleshooting and calibration. * For more details, please refer to the related link page or feel free to contact us.

Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

【Other Features】 ■ Achieves high process accuracy and control even under harsh conditions due to the highly durable device housing. ■ Improves the S/N ratio at low set points with unique thermal sensor technology. ■ Long-term stability of the sensor eliminates the need for maintenance or regular recalibration. ■ Up to six calibration programs can be accommodated with a single device. ■ Equipped with an easily accessible service port to simplify installation, troubleshooting, and diagnostic tasks. ■ High precision is achieved through high-performance measurement systems and calibration based on global standards. ■ Streamlines integration into existing systems with several types of protocol communication interfaces. *For more details, please refer to the related link page or feel free to contact us.

Introducing cost-effective gas flow measurement for targeted applications!

【Other Features】 ■ Mass flow measurement - No need for temperature or pressure compensation ■ Compatible with most applications ■ High durability stainless steel structure with no moving parts, offering high corrosion resistance and long-term stability ■ Compatible with most process/test gases ■ Simple and cost-effective installation ■ Flow display, trend display, and total display via electronic output signals ■ First choice for upgrading from area flow meters *For more details, please refer to the related links page or feel free to contact us.

Ultra-fast response for flow processes focused on speed! Suitable for a wide variety of non-corrosive gases.

【Other Features】 ■ Suitable for a wide variety of non-corrosive gases ■ Fast response time ensures quick steps even during process recipe changes ■ Suitable for OEMs ■ Various communication options that can be tailored to user requirements *For more details, please refer to the related link page or feel free to contact us.

Excellent long-term stability, maintaining production accuracy! We perform highly reliable, precise, and repeatable measurements and controls.

【Other Features】 ■ Proven long-term stability and accuracy across a wide range of processes and applications ■ Provides excellent return on investment through reliable performance ■ Removable flow sensor that does not require continuous monitoring and gas pressure adjustment ■ Easy installation and servicing with dedicated analog input/output *For more details, please refer to the related link page or feel free to contact us.

Proven long-term stability! We provide ultra-high purification performance for high-temperature applications.

【Other Features】 ■ Closed valve during normal operation (option for open valve during normal operation is also available) ■ Electric valve override ■ Low command flow cutoff ■ "Valve Off" function compliant with TTL *For more details, please refer to the related link page or feel free to contact us.

Proven performance at low flow rates. We offer versatile options to match various needs!

【Other Features】 ■ Built-in float stopper to prevent float loss during tapered pipe replacement ■ Various valve options (inlet or outlet) ・ Cartridge III valve ・ NRSTM (Non-Rising Stem) valve ・ Flow controller * For more details, please refer to the PDF document or feel free to contact us.

A flow meter that allows you to select a scale/marking specified by our company according to your desired flow rate.

【Options】 ■ High flow and low flow alarms ■ Panel or wall-mounted ■ Needle valve *For more details, please download the PDF or feel free to contact us.

Applications for gas flow control with excellent response speed and repeatability.

**Merits** - High-performance components that execute continuous testing in accordance with semiconductor industry standards - Reduced dry-down time during purging - Ability to set new process gases and/or ranges in under 60 seconds - Support for unexpected replacement or upgrades of metal seal MFCs, including brands - Convenient user display and independent diagnostic/service port, etc. *For more details, please download the PDF or feel free to contact us.*

Suitable for application to various gases, liquids, and vapors! A meter that accommodates a wide range of temperatures, pressures, and process ranges.

**Advantages** - High repeatability in flow measurement even at ultra-low process temperatures and maximum process temperatures of VA meters. - Designed to meet the conditions of large plants (industrial facilities) worldwide and comply with ASME B31.3. - No power supply required, reducing usage costs and simplifying installation. - A wide range of pressure and temperature allows a single meter to accommodate various applications. - Exceptional reliability used globally for several decades, among others. *For more details, please download the PDF or feel free to contact us.*