ALICAT Mass Flow Meter [Standard Type]
High-precision mass flow meter
Supports 98 types of gases, including mixed gases. High accuracy of ±0.6% RD (16.7–100% FS) with a fast response time of 10 ms.
basic information
A lineup ranging from ultra-low flow (0.5 SCCM) to high flow (12,000 SLPM).
Delivery Time
OTHER
Model number/Brand name
M Series
Applications/Examples of results
Flow measurement
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