Dry etching equipment
Dry etching equipment
We would like to introduce the "dry etching equipment" that we handle.
1～3 item / All 3 items
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Dry etching equipment
Switching between RIE mode and DP mode is possible! Reduction of metal contamination through special surface treatment.
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Custom-made production achievements: Dry etching equipment
We have a track record of devices such as "XeF2 etching equipment" and "batch-type ashing equipment."
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Assing device
It is a versatile and compact device that enables etching, ashing, and ion cleaning!
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