Diaphragm vacuum pump for exhaust of turbo molecular pump
Diaphragm vacuum pump for exhaust of turbo molecular pump
Turbo molecular pump systems require a deep vacuum for startup and effective operation. To achieve this vacuum, they often rely on diaphragm pump technology for roughing pumps. Turbo molecular pump systems are widely used in various applications such as mass spectrometry, leak detection, and semiconductor manufacturing. These complex systems require an extremely deep vacuum state to operate effectively, and to reach that level, they have no choice but to depend on diaphragm pumps. Diaphragm pump technology offers several advantages over other pump types for these applications.
1～5 item / All 5 items
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KNF N84.4 N84.5 Series Vacuum Pump
Due to excellent suction speed, the measurement chamber is evacuated quickly, achieving stable vacuum in the transfer area to a high-flow turbo molecular pump at high vacuum.
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KNF N84.3 Series Vacuum Pump
Due to excellent suction speed, the measurement chamber is evacuated quickly, providing stable vacuum in the transfer area to a high-flow turbo molecular pump at high vacuum.
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KNF N952 Series Diaphragm Vacuum Pump
Excellent vacuum performance and exhaust speed, low vibration and low noise, and our own brushless DC motor allow for digital customization based on the settings of each parameter.
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KNF Turbo Molecular Pump TMP Auxiliary Pump
TMP roughing pump (turbo molecular pump auxiliary pump)
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KNF N813 Series Vacuum Pump
Due to its excellent suction speed, it quickly evacuates the measurement chamber, providing stable vacuum in the transfer area to the high-flow turbo molecular pump at high vacuum.
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