Continuous Atmospheric Pressure CVD System for solar cell mass production (AMAX1000S)
For mass production of crystalline Si solar cells/For NSG(SiO2)/PSG/BSG deposition High productivity/Continuous atmospheric pressure CVD (APCVD) system
AMAX1000S is a continuous atmospheric pressure CVD system (APCVD system) developed for solar cell products based on the achievements of the "AMAX" series. 【Features】 ・Compatible with 156 mm square/125 mm square wafers ・High productivity of 1500 wafers per hour ・Compatible with thin wafers for solar cells 【Applications】 ・Hard mask for diffusion/ion implantation, Sacrificial deposition (NSG) ・Passivation deposition (protective deposition, insulating deposition) (NSG) ・Source deposition for solid phase diffusion (BSG, PSG)/Cap deposition (NSG) *For more details, please contact us or download the catalog to view.
basic information
A large dispersion head (gas nozzle) and ultra high-speed double-arm transfer mechanism are installed to enable mass production that meets solar cell production needs. In addition, a special wafer holder, lamp heating mechanism, multi-stage Bernoulli chuck, etc. are used to accommodate thin wafers for solar cells. ●System size (mm): 1860(W) x 5900(D) x 2100(H) ●Gas type: SiH4/O2 (SiH4/PH3/B2H6/O2/N2) ●Deposition temperature: up to 430 degrees C *For more details, please contact us or download the catalog to view.
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Delivery Time
Model number/Brand name
AMAX1000S
Applications/Examples of results
【Applications】 ・Hard mask for diffusion/ion implantation, Sacrificial deposition (NSG) ・Passivation deposition (protective deposition, insulating deposition) (NSG) ・Source deposition for solid phase diffusion (BSG, PSG)/Cap deposition (NSG) 【Delivery Record】 ・Domestic and overseas solar cell manufacturers
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Founded in 1930 as a specialized trading company for imports and exports, we celebrated our 90th anniversary in 2020 and are fully committed to the further development of the M.WATANABE Group. Since the mid-1960s, we have started manufacturing and selling our own products such as quartz processed products, silicone rubber molded products, and cleaning equipment, under the policy of selling silicon (Si) related products to the semiconductor industry. As a manufacturing trading company, we have grown alongside the IT society by providing high-quality products and services. Moving forward, we aim to create a company where employees of the group companies, centered around M.WATANABE & CO.,LTD., work vibrantly every day, and the entire workplace becomes a learning organization. We are determined to continue striving in all our business endeavors with a strong will to respond to the true needs of society. We sincerely ask for your continued support and patronage.