Semiconductor-related products
Semiconductor-related products
This is an introduction to semiconductor-related products.
1～23 item / All 23 items
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Quartz Glass Products and Processed Quartz Glass Products 'Active in semiconductor manufacturing processes'
Our group companies manufacture quartz glass products. We have many delivery records to domestic and overseas semiconductor device manufacturers and silicon manufacturers.
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Heat-resistant Glass Fiber (Siliglas) “High-temperature heat resistance”
Capable of handling long hours of continuous use even at temperatures as high as 1000 degrees C. Heat-resistant glass fiber "Siliglas"
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Surface Modification Treatment Processing and Jig Cleaning (TOMCO)
Maintenance of jigs and parts is from quality maintenance and improvement. Our thermal spraying and cleaning technology reproduces high quality without damaging the base material.
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Atmospheric Pressure CVD (APCVD) System for Small-scale Production and Development (D501)
For prototyping, development, and small lot production For deposition of NSG(SiO2)/BSG/PSG/BPSG Batch processing (simultaneous processing of multiple substrates) APCVD system
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High-performance Single-wafer Processing Atmospheric Pressure CVD (APCVD) System (A200V)
Small quantities and wide varieties. NSG(SiO2)/PSG/BPSG deposition. Single-wafer processing atmospheric pressure CVD (APCVD) system (Compatible with 8-inch SiC wafers)
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Continuous Atmospheric Pressure CVD System for solar cell mass production (AMAX1000S)
For mass production of crystalline Si solar cells/For NSG(SiO2)/PSG/BSG deposition High productivity/Continuous atmospheric pressure CVD (APCVD) system
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High-productivity Continuous Atmospheric Pressure CVD (APCVD) System (AMAX800V)
Mass Production / NSG(SiO2)/PSG/BPSG deposition High-productivity/Continuous atmospheric pressure CVD (APCVD) system (for up to 8-inch wafers)
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High-productivity Continuous Atmospheric Pressure CVD (APCVD) System (AMAX1200)
Mass production / NSG(SiO2)/PSG/BPSG deposition High-productivity / Continuous atmospheric pressure CVD (APCVD) system (for 12-inch wafers)
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Glass Substrate Deposition System “Low Temperature Deposition” “Flexible Substrate Support”
4.5 generation glass substrate deposition system for rigid/flexible devices such as FPD.
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Spin Type Cleaning System WULF series for high definition photomasks
Equipped with a spin cleaning unit that uses tap water. This method utilizes a cleaning solution that replaces the RCA cleaning solution.
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IPA Vapor Drying System
IPA vapor displaces moisture and dries the object. For 4 to 8-inch wafers. Can be installed into and docked to various cleaning tools.
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Wafer Transport and Transfer System “Pitch Conversion” and “Face to Face Transfer”
Automatic transfer of wafers in a cassette to another cassette/Possible to add functions such as simultaneous transfer of 2 cassettes, pitch conversion, and face-to-face (back-to-back) transfer.
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Quartz Tube Cleaning System (HTC/VTC series) “Contributing to the reduction of chemical solution and pure water”
Vertical cleaning system (VTC series) saves space and contributes to the "reduction of chemical solution and pure water". World's top-class delivery record (over 400 units)
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Glass-like Carbon “Carbon material with excellent chemical and corrosion resistance”
Glass-like Carbon is a type of carbon material with a proven track record for use in semiconductor manufacturing system components. High purity is also possible.
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Carbon Adhesive “high-strength, heat-resistant adhesive for carbon materials”
High-strength, heat-resistant adhesive for carbon materials. Adhesion is possible without impairing the excellent properties of carbon materials.
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Molybdenum Disilicide (MoSi2) Heaters “Up to 1800 degrees C usable!”
Molybdenum Disilicide Heaters: Repeatable, and long-life, customized design is possible
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Thermocouple for High-temperature Furnace (for semiconductor manufacturing system)
Highly accurate temperature measurement function is ideal for temperature control of heat treatment process!
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Silicon Wafer Polishing Carrier “quick delivery and small lot production is available”
We manufacture carriers according to customer needs for use as wafer holders in the lapping and polishing process of silicon wafer manufacturing.
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Virtualization of the Control System for semiconductor manufacturing equipment.
Prolonging use, maintenance improvement, and system maintenance of semiconductor manufacturing equipment that are no longer supported. Control device life-prolonging treatment of aging, and expensive semiconductor manufacturing equipment.
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Glass-like Carbon Coat “Technology to form a coating layer”
Glass-like carbon coating is a technology that forms a coating layer of glass-like carbon by heating up graphite material coated with a proprietary resin.
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Repair of Electronic and Industrial Devices for semiconductor manufacturing system
Significant cost advantages over purchasing products by identifying the repair parts and replacing them. Repair of discontinued parts is also available.
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Precision Machined Parts (TOMCO) “reliable machining technology and quick delivery”
We support our customer's development of superior products with our proven processing technology and quick delivery.
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PVA sponge roll - Excellent water absorption, chemical resistance, and filtration properties.
Glass and printed circuit board semiconductor manufacturing process field: PVA sponge roll boasting excellent water absorption, chemical resistance, and filtration properties.
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