Glass-like Carbon Coat “Technology to form a coating layer”
Glass-like carbon coating is a technology that forms a coating layer of glass-like carbon by heating up graphite material coated with a proprietary resin.
Glass-like carbon coating is a technology that forms a coating layer of glass-like carbon by heating up graphite material coated with a proprietary resin. This technology can be used to coat parts for semiconductor manufacturing systems to reduce particle generation from the parts. 【Features】 ・Reduces dust generation of graphite materials. ・Permeating not only the surface of the graphite material but also the inside. ・Reduces the generation of gas from graphite materials. ・Reduces gas permeation of graphite materials. ・Capable of handling various shapes of graphite materials. ・Reduces reaction with metal and glass. *For more details, please contact us.*
basic information
Glass-like carbon coating is a technology that forms a coating layer of glass-like carbon by heating up graphite material coated with a proprietary resin. This technology can be used to coat parts for semiconductor manufacturing systems to reduce particle generation from the parts. *For more details, please contact us.*
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Applications/Examples of results
【Applications】 ・Jigs for semiconductor manufacturing ・Jigs for FPD manufacturing ・Jigs for assembly of electronic components ・Crucibles for vapor deposition ・Jigs for Hermetic sealing jigs ・High-temperature and vacuum components ・Other Graphite Products
