Wafer Transport and Transfer System “Pitch Conversion” and “Face to Face Transfer”
Automatic transfer of wafers in a cassette to another cassette/Possible to add functions such as simultaneous transfer of 2 cassettes, pitch conversion, and face-to-face (back-to-back) transfer.
Wafer transport and transfer system is the system that automatically transfers wafers from one open cassette to another open cassette, quartz (SiC) boat, and so on. 【Features】 ・Transfer system for 4-inch to 8-inch wafers ・Automatic transfer of wafers in CR is possible. ・Possible to add functions such as simultaneous transfer of 2 cassettes, pitch conversion, and face-to-face (back-to-back) transfer. *For more details, please contact us or download the catalog to view.
basic information
Wafer transport and transfer system is the system that automatically transfers wafers from one open cassette to another open cassette, quartz (SiC) boat, and so on. Possible to add functions such as simultaneous transfer of 2 cassettes, pitch conversion, and face-to-face (back-to-back) transfer. ・Open cassette←→Open cassette transfer ・Open cassette ←→ Quartz (SiC) boat transfer ・Simultaneous transfer of 2 cassettes ・Pitch conversion transfer ・Face to Face (Back to Back) transfer ・Single-wafer transfer to long boats *For more details, please contact us or download the catalog to view.
Price range
Delivery Time
Applications/Examples of results
【Applications】 ・Transfer of wafers between transport cassettes and process cassettes before and after diffusion/cleaning processes
