[Analysis Case] Quality Evaluation of SiC Substrates

Evaluation of crystal orientation, in-plane defect distribution, surface roughness, and impurities.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Carrier Density Distribution in Power Devices

Evaluation of the activation rate of the Dopant is possible.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Dopant and Carrier Concentration Distribution in Power Devices

Evaluation of activation rate is possible through composite analysis.

last updated Mar 13, 2025

[Analysis Case] SSDP-SIMS Analysis of Mg in GaN-based LED Structure

It is possible to obtain the impurity profile in the GaN-based LED structure from the backside.

last updated Mar 13, 2025

Interference peak removal process in quantitative analysis

X-ray photoelectron spectroscopy (XPS)

last updated Mar 12, 2025

Regarding the depth conversion of SRA

SRA: Spread Resistance Measurement Method

last updated Mar 12, 2025

About the concentration conversion of SRA.

SRA: Spread Resistance Measurement Method

last updated Mar 12, 2025

Large-diameter imaging SIMS using RAE detectors

SIMS: Secondary Ion Mass Spectrometry

last updated Oct 03, 2025

Precautions for Low-Temperature Photoluminescence Measurement

Photoluminescence method

last updated Mar 12, 2025

[Analysis Case] Evaluation of Composition and Bonding State of GaN Film by XPS

Evaluation will be conducted under measurement conditions tailored to the purpose.

last updated Sep 17, 2025

[Analysis Case] Removal of Organic Contaminants by Etching

We will remove surface contamination and conduct an evaluation using XPS.

last updated Mar 13, 2025

Valence evaluation of metal oxides by chemical shift

XPS: X-ray Photoelectron Spectroscopy

last updated Mar 12, 2025

Types and Characteristics of Electron Diffraction

TEM: Transmission Electron Microscopy

last updated Mar 12, 2025

[Analysis Case] Polarity Evaluation of GaN by ABF-STEM Observation

Atomic-level observation is possible with the Cs collector-equipped STEM.

last updated Mar 13, 2025

[Analysis Case] Evaluation of High Electron Mobility Transistors

Evaluation of crystal coherence and compositional distribution is possible with Cs collector attached STEM.

last updated Mar 13, 2025

[Analysis Case] Ultra-high Sensitivity Measurement of Impurities in SiC Using SIMS

Evaluates bulk concentrations at the ppb to ppt level.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Impurity Concentration in Gallium Oxide Ga2O3 Films Using SIMS

It is possible to quantitatively evaluate impurity elements.

last updated Mar 13, 2025

[Analysis Case] Low-Temperature PL Spectrum of Si After Ion Implantation Annealing Treatment

It is possible to confirm the recovery of crystallinity due to irradiation defects and annealing.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Metal Element Concentration Near the Surface of Gallium Oxide Ga2O3 Film

High sensitivity analysis even in extremely shallow areas.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Silicon Oxide Film by XAFS

Local structural analysis around silicon, quantification of intermediate oxides, evaluation of bulk and interfaces.

last updated Mar 13, 2025

[Analysis Case] Evaluation of the Diffusion Layer of SiCMOSFET Using SCM and SMM

You can evaluate the p/n polarity and carrier concentration distribution of the SiC device's diffusion layer.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Carrier Concentration Distribution in Si-IGBT Chips

SRA evaluation of field stop layers and lifetime killers.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Organic Contamination of Wafers in Wafer Cases

You can evaluate the causes and total amount of organic contamination in the manufacturing process.

last updated Mar 13, 2025

[Analysis Case] Band Gap Evaluation of Oxidized and Nitrided Thin Films

High-precision band gap evaluation is possible through combined analysis of XAFS and XPS.

last updated Mar 13, 2025

Examples of TDS analysis by representative materials and purposes

TDS: Thermal Desorption Gas Analysis Method

last updated Mar 12, 2025

[Analysis Case] Evaluation of GaN Crystal Growth by XRD and EBSD

Cross-sectional mapping allows for the evaluation of the crystal growth of GaN.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Ion Implantation Damage in GaN by XAFS

It is possible to confirm the recovery of crystallinity due to irradiation defects and annealing.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Gold Thin Film Adhesion on Wafer by XRF

Comparison of the amount of thin film components adhered between samples.

last updated Mar 13, 2025

[Analysis Case] In-plane film thickness evaluation of Au thin film on wafer using XRF.

Visualization of film thickness distribution through multi-point mapping measurement.

last updated Mar 13, 2025

[Analysis Case] Evaluation of Si-based IGBT Chip Cross-section by Low-Temperature Micro Photoluminescence Analysis

It is possible to confirm the influence of the lifetime killer from the cross-sectional direction.

last updated Mar 13, 2025