Gas analysis using the heart-cut EGA method.

GC/MS: Gas Chromatography-Mass Spectrometry

last updated Apr 02, 2026

[Analysis Case] Composition Evaluation of Nozzle Surface and Inner Wall

It is possible to evaluate the compositional distribution of the convex and concave samples.

last updated Apr 02, 2026

Gas generation analysis by EGA-MS method

GC/MS: Gas Chromatography-Mass Spectrometry

last updated Apr 02, 2026

[Analysis Case] Evaluation of Cu Surface Discoloration Using AES and SEM-EDX

It is possible to perform elemental analysis with a shallow detection depth while conducting SEM observation.

last updated Apr 02, 2026

[Analysis Case] Fluorescent X-ray Analysis Case of Metal Materials

As a metal composition evaluation, we recommend starting with elemental screening using XRF analysis.

last updated Apr 02, 2026

Examples of TDS analysis by representative materials and purposes

TDS: Thermal Desorption Gas Analysis Method

last updated Apr 02, 2026

Evaluation of metal contamination on the Si wafer surface

ICP-MS: Inductively Coupled Plasma Mass Spectrometry

last updated Apr 02, 2026

[Analysis Case] Investigation of Watermark Causes

Identification of contamination sources on the outermost surface using TOF-SIMS.

last updated Apr 02, 2026

[Analysis Case] Analysis of Microscopic Contaminants on Wafer Surface

Composition analysis of 30nm size is possible without processing.

last updated Apr 02, 2026

[Analysis Case] Evaluation of the Fracture Surface of Laminated Samples by AES Analysis

Visualizing a 50nm thin film with a cross-sectional sample.

last updated Apr 02, 2026

Evaluation of organic contamination using a wafer analyzer with GC-MS.

GC/MS: Gas Chromatography-Mass Spectrometry

last updated Apr 02, 2026

[Analysis Case] Thermal Desorption Gas Analysis of Metal (Sn)

TDS analysis of low melting point metals

last updated Apr 02, 2026

[Analysis Case] Analysis of Metal Contamination in SiN Films

High-sensitivity analysis using ICP-MS.

last updated Apr 02, 2026

Molecular weight distribution measurement by GPC

HPLC: High-Performance Liquid Chromatography

last updated Apr 02, 2026

[Analysis Case] Raman Mapping of Carbon Materials

It is possible to evaluate the distribution of the crystalline state of carbon within the sample surface.

last updated Apr 02, 2026

[Analysis Case] Corrosive Gas Analysis by TDS

You can check for gases that have a negative impact on the product.

last updated Apr 02, 2026

[Analysis Case] Observation of Shape Changes of Polymers on a Substrate Using Liquid AFM Measurements

Visualization of structural changes in samples in the atmosphere and in aqueous solutions.

last updated Apr 02, 2026

Outgas analysis using a gas concentration device with GC/MS.

GC/MS: Gas Chromatography-Mass Spectrometry

last updated Apr 02, 2026

[Analysis Case] Foreign Substance Analysis on Metal Components by Raman

Measurement targeting microdomains is possible.

last updated Apr 02, 2026

[Analysis Case] Evaluation of Metal and Organic Contamination on Wafer Surface

Comprehensive evaluation based on the analysis results of multiple methods.

last updated Apr 02, 2026

[Analysis Case] Evaluation of Gold Thin Film Adhesion on Wafer by XRF

Comparison of the amount of thin film components adhered between samples.

last updated Apr 02, 2026

[Analysis Case] In-plane film thickness evaluation of Au thin film on wafer using XRF.

Visualization of film thickness distribution through multi-point mapping measurement.

last updated Apr 02, 2026

[Analysis Case] Depth Direction Analysis of XPS on the Micron (μm) Order

Depth direction analysis will be conducted to a depth of several micrometers.

last updated Apr 02, 2026

[Analysis Case] Analysis of Hydrogen Desorption from Stainless Steel by TDS

It is possible to evaluate the amount of hydrogen released from metals using TDS (Thermogravimetric Desorption Gas Analysis).

last updated Apr 02, 2026

Analysis case: Evaluation of the oxide film on the surface of solder balls.

Evaluation case of spherical shape samples

last updated Apr 02, 2026

Analysis case: Metal content analysis in a solution

High-sensitivity analysis of various solutions, such as pure water and wafer cleaning liquids, is possible.

last updated Apr 02, 2026

[Analysis Case] Tensile Test of Foam Rubber Using X-ray CT

Measurement and analysis of shape changes inside the sample in situ.

last updated Apr 02, 2026

[Analysis Case] TDS Analysis of Epoxy Resin

It is possible to investigate the degassing behavior of organic matter in a vacuum.

last updated Apr 02, 2026

[Analysis Case] Simultaneous Heating Analysis of Copper Plates and Solder by TDS

It is possible to evaluate degassing in an environment close to the actual process by bringing the materials into contact with each other.

last updated Apr 02, 2026

Angle-resolved HAXPES measurement

HAXPES: Hard X-ray Photoelectron Spectroscopy

last updated Apr 02, 2026