Automatic attachment and detachment device without metal ion elution for the semiconductor industry.
We will automate the attachment and detachment process of wafer cleaning solutions using a connector for automatic attachment and detachment that does not release metal ions (patented technology).
In an electronic materials manufacturing factory, we have automated the process of adding cleaning solution to substrates between the raw material line and the transfer tank, as well as from the transfer tank to the filling machine. We developed an automatic detachable connector with all contact parts made of PTFE, eliminating the leaching of metal ions to zero. Additionally, the internal valve is molded integrally with PTFE, providing very high cleanliness. *The body can also be made of PVC. This system is used not only in the semiconductor industry but also in strong acid (hydrochloric acid) lines in the pharmaceutical industry for automatic piping switching devices.
basic information
Caliber and specifications: Custom-made for each customer.
Price range
Delivery Time
Applications/Examples of results
- Front-end processes in the semiconductor industry *Lines that dislike metal ion elution - Front-end processes in the pharmaceutical industry *Lines that require corrosion resistance with substances like hydrochloric acid - Front-end processes in the chemical industry Others
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