スピンソニッククリーナー
スピンソニッククリーナー
サブミクロンのパーティクルまでも非接触でウェハー両面を同時洗浄。 ウェハー横置き、枚葉式ファインジェット方式の採用で高い洗浄能力を実現。 スピンソニッククリーナーは、サブミクロンのパーティクルまでも取り除きます。 さらに工程数をカットし、薬液管理およびヒーターが不要に。 洗浄時間の短縮、ランニングコストの節約などを可能とするすぐれたパフォーマンスを発揮します。
1～8 item / All 8 items
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LEO Unit PT-0878LEO
Achieving long-duration running! A cleaning liquid treatment unit equipped with deep ultraviolet LEDs for a dehydrated mercury-free society.
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Radical cleaning unit for semiconductors
High-efficiency OH radical generation, space-saving design, mercury-free UV-C LED equipped.
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Radical Cleaning Unit for Medical Devices
Increased sterilization efficiency with OH radicals! Compact design for space-saving.
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Radical Cleaning Unit for Research Institutions
High-efficiency OH radical generation, compact design, mercury-free LED equipped.
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Radical Cleaning Unit for Electronic Components
High-efficiency OH radical generation! Space-saving design optimizes the surface treatment of electronic components.
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Display-oriented radical cleaning unit
High-efficiency OH radical generation, space-saving design. For foreign matter removal in display manufacturing.
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Radical Cleaning Unit for Pharmaceuticals
High-efficiency OH radical generation, compact design, mercury-free LED equipped.
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Radical Cleaning Unit for Food Processing
Sterilizing food with OH radicals. Compact design for space-saving.
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