Radical cleaning unit for semiconductors
High-efficiency OH radical generation, space-saving design, mercury-free UV-C LED equipped.
In the semiconductor industry’s precision cleaning processes, advancements in microfabrication technology have led to demands for higher cleaning accuracy and reduced environmental impact. In particular, the complete removal of organic contaminants and photoresist residues, as well as the suppression of metal contamination, are critical challenges that affect product quality and yield. Radical cleaning units achieve high-purity cleaning and contribute to solving these issues. 【Usage Scenarios】 - SPM-free photoresist removal process - Suppression of organic and metal contamination - Metal film oxidation prevention process 【Benefits of Implementation】 - Improved cleaning efficiency - Reduced environmental impact - Enhanced product quality
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**Features** - Compact size for space-saving installation - Linear light emission control is possible - High-efficiency cleaning while minimizing environmental impact - Wide range of applications including semiconductor manufacturing, medical devices, and food processing - Feedback settings during degradation are possible through internal unit control **Our Strengths** We specialize in customized production based on customer specifications to meet the needs of clients in the semiconductor industry, providing total support for the product lifecycle from design, development, assembly, inspection, installation, to maintenance.
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Our company develops, designs, manufactures, and sells various equipment tailored to customer applications and manufacturing lines in the semiconductor, photomask, disk, and lens industries. We specialize in customized production based on customer specifications, providing total support for the product lifecycle from design, development, assembly, inspection, installation, to maintenance. By building close relationships with customers at every stage, we can directly sense the issues and technological trends they perceive, allowing us to quickly initiate development in response.