精密洗浄装置
精密洗浄装置
洗練された超音波洗浄ユニットにより、スーパークリーン洗浄を実現。 あらゆる精密部品・製品の洗浄工程で幅広く導入されている信頼性の高いシステムです。 タッチパネルなどの採用により、操作性・安全性・メンテナンス性がさらに向上。 またシステムの随所にハイグレードなパーツを使用して完成度を高めています。
1～5 item / All 5 items
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Precision cleaning device
Achieving super clean cleaning with a sophisticated ultrasonic cleaning unit.
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Disk cleaning device
Achieving high-quality cleaning through a combination of batch washing and brush cleaning.
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Cassette-less cleaning device
Achieving a high level of both quality and energy efficiency. Cleaner with a smaller amount of solution in the tank.
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Spin Sonic Cleaner
Simultaneous non-contact cleaning of both sides of the wafer, even for submicron particles.
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Spin cleaning unit for corner substrates and photomasks
Compatible with square substrates such as photomask substrates. Achieves integrated processing within the same unit, from cleaning solution supply from both the top and bottom sides to drying through high-speed rotation.
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