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For high-precision thickness measurement of opaque materials, Enovasense's laser photo-thermal sensor can measure thickness from a minimum of 10nm, regardless of the material.

■Thickness measurement range 10nm~1mm ■Measurement accuracy 0.5~3% or less ■Beam spot diameter φ0.15mm or more ■Measurement mode Phase shift, amplitude ■Product lineup Multiple lineups available for probes (working distance, beam spot diameter) and lasers (wavelength, power)

Affordable distance sensors for measuring film and coating thickness, as well as non-contact thickness measurement. Strong performance on slopes, achieving a distance direction resolution of 20nm!

【CHRocodile C】Low footprint probe-integrated type ■Features - Scan rate: 4 kHz - Light source: White LED light source - Measurement range: 5 types from 200 µm to 10 mm - Thickness measurement capable of measuring single layer and multiple layers (up to 3 layers) - Synchronous I/O function included - Interface: Ethernet/RS422 - HS (high sensitivity model) available - External box capable of capturing encoder and 2-channel analog input - External dimensions: 99 x 65 x 47 mm (without probe) - Weight: 440 g ■Features 【CHRocodile Mini】Space-saving separate probe type - Scan rate: 4 kHz (optional 10 kHz) - Light source: White LED light source - Measurement range: 2 types of 4 mm and 10 mm - Thickness measurement capable of measuring single layer and multiple layers (2 layers, optional 4 layers) - Synchronous I/O function included - Interface: Ethernet/RS422 - Mini+ model supports 2-channel analog output and 3-axis encoder input - External dimensions: 95 x 106 x 95 mm (controller) - Weight: 500 g (Mini+ is 550 g)

High-speed opaque film thickness mapping and area detection of internal defects using a laser photothermal sensor.

■Thickness measurement range 　~1mm ■Measurement accuracy 　Approximately 1~3% ■Spatial resolution 　Minimum 28um ■Measurement modes 　Phase shift, amplitude ■Product lineup 　Two types: HR (high resolution) and LF (wide field)

Optical sensor for measuring a wide range of thickness from 0.5 to 200 um. High-speed sampling at 5 kHz. Ideal for monitoring applications during processing.

【Other Features】 ■Measurement Range: 2μm to 1000μm (n=1) 0.5μm to 200μm (n=3.8, etc.) ■Resolution: Up to 3nm (n=1) ■Measurement Frequency: 5kHz ■Interface: Ethernet, RS422, Analog (2ch) *For more details, please refer to the PDF document or feel free to contact us.

Capable of measuring the total thickness of 12-inch wafers. High-speed measurement without the influence of vibrations, without a scanning stage. Suitable for online, offline, and wafer inspection applications.

For more details, please refer to the PDF document or feel free to contact us.

Non-contact optical thickness measurement. Applicable even for thickness measurements of semiconductor wafers where high precision is required.

【Other Features】 ■Measurement Range: 32μm to 3900μm (n=1, Linearity 1μm) 16μm to 1900μm (n=1, Linearity 0.35μm) ■Resolution: Up to 1nm (n=1) ■Measurement Frequency: 70kHz ■Interface: Ethernet, RS422, Analog (2ch) *For more details, please refer to the PDF document or feel free to contact us.

Non-contact line sensor CLS. High precision, high speed, and wide range 3D shape measurement. High tolerance for angles suitable for edges and slopes. Numerous achievements in wafer edge measurement.

【Application】 Non-contact 3D shape measurement is possible. It is also possible to replace contact methods with non-contact methods. ■ Home Appliances (Smartphones) - LCD glass - OLED mask inspection - Fine scratches and other surface defects - Wire bonding - AR glasses ■ Semiconductor Manufacturing Process - Wafer edge shape measurement - Wafer edge defect inspection - Wafer dicing groove appearance inspection - BGA inspection - IC package and circuit inspection ■ Automotive - Valve inspection - Car interior - Glass inspection - Inspection of airbag welding beads

The "CHRocodile 2 IT sensor" can measure the thickness of wafers during work processing.

【Other Features】 ■ Operators can achieve a high grinding rate, resulting in a significant reduction in processing time. ■ At the end of the process, the rate can be lowered again to maintain a smooth finish on the wafer. *For more details, please refer to the PDF document or feel free to contact us.

Use an appropriate light source wavelength for doped wafers to accommodate challenging doped wafer thickness measurements.

【Other Features】 ■Measurement Range: 2DW1000 50μm–8000μm (n=1) 　　　　　　　2DW500 30μm–4000μm (n=1) 　　　　　　　2DW250 15μm–2000μm (n=1) ■Resolution: Up to 1nm (n=1) ■Interface: Ethernet, RS422, Analog (2ch) *For more details, please refer to the PDF document or feel free to contact us.

12" wafer full inspection accelerated, can also be used for full inspection of wafers.

■Overview - A system that integrates hardware (enclosure, optical thickness sensor, area scanner, electrical cabinet) and software (SEMI-compliant software). - High-speed measurement of up to 70kHz (measuring a 12" wafer in about 2 minutes at an XY pitch of 160um). - Z resolution of 1nm or more. ■Thickness Measurement Range The thickness measurement range varies depending on the optical sensor below. CHRocodile 2 IT DW 250: 15~1500um CHRocodile 2 IT DW 500: 26~2500um CHRocodile 2 IT DW 1000: 66~7200um *Thickness is the optical length. To convert to Si thickness, divide the above thickness by the refractive index of Si.

Embedded optical sensor for high-precision and high-speed measurement of thickness and shape.

■Single Point Sensor CHRocodile 2S Thickness measurement range: 2~180um (optical length) Distance measurement range: 0.1~38mm (depending on the probe) Z resolution: a few nm~ Measurement frequency: up to 70kHz ■Dual Point Sensor CHRocodile 2DPS Thickness measurement range: 2~180um (optical length) Distance measurement range: 0.1~38mm (depending on the probe) Z resolution: a few nm~ Measurement frequency: up to 10kHz ■Dual Point Sensor (High Power) CHRocodile 2DPS HP Thickness measurement range: 2~180um (optical length) Distance measurement range: 0.1~38mm (depending on the probe) Z resolution: a few nm~ Measurement frequency: up to 40kHz