All products and services
1～5 item / All 5 items
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Wafer Surface Measurement System "WSMS Integra HT"
Integrating vapor phase decomposition (VPD), liquid handling, and direct measurement by ICP-MS into a single fab-compatible platform!
last updated
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Transmissive dark field plane polarimeter 'SIRD SiC 200'
Integration of SECS/GEM communication and OHT handling enables unmanned 24-hour monitoring in fully automated factories!
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Automated solution for plasma treatment
Achieving continuous plasma processing through automatic loading and unloading with OHT and AGV/AMR systems!
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Refining furnace for carbon felt components "Carbon.Pure"
Introducing a high-quality furnace system specialized for the vacuum refining of graphite and CFC components!
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High-performance VGF system "Kronos"
Achieve complete transparency and management of processes through automatic temperature profile recording!
last updated