Wafer Surface Measurement System "WSMS Integra HT"
Integrating vapor phase decomposition (VPD), liquid handling, and direct measurement by ICP-MS into a single fab-compatible platform!
The "WSMS Integra HT" is a wafer surface measurement system designed to reliably and fully automatically detect ultra-trace levels of contamination inline. With a single fab-compatible platform, it detects and quantifies metal contamination on silicon wafer surfaces at ultra-trace levels. It is a fully automated, inline system that combines Vapour Phase Decomposition (VPD) and Inductively Coupled Plasma Mass Spectrometry (ICP-MS). 【Features】 ■ Fully automated VPD process ■ Modular and scalable platform ■ High throughput architecture ■ Audit-compliant verified results ■ Wide bandgap compatibility ■ Certified and fab-deployable *For more details, please download the PDF (English version) or feel free to contact us.
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PVA Japan LLC provides advanced systems and measurement solutions that drive progress in major industrial sectors around the world. From semiconductors to aerospace technology, we develop and manufacture innovative systems for the production, refinement, and inspection of advanced materials across a wide range of industries. We also offer advanced solutions for acoustic, chemical, and optical inspection and analysis of materials and components. Our portfolio of products and technologies enables efficient, reliable, and scalable high-quality production.