ICP plasma etching device "SERIO"

Achieve smooth etching surfaces and high machining precision! We support sample testing!

last updated Jun 17, 2019

ICP metal etching equipment

Supports etching of fine patterns of metal films such as Al and Cr! Demo machines available! Facility tours and sample testing are currently being conducted.

last updated Dec 16, 2019

Plasma etching device "EXAM" sample testing now accepting applications.

A compact batch-type plasma etching device that supports sub-micron etching and features process support through sample testing.

last updated May 13, 2020

Single-wafer plasma etching device "EXAM-Σ"

Carefully responding to niche demands. Light etching and ashing for thin wafers and double-sided processing, compact type CtC etching equipment.

last updated Apr 24, 2020

DLC De-coating Device (Plasma Cleaner for Precision Molds)

A plasma cleaning device with extensive experience in removing DLC films from aspherical lenses. An essential dry film removal device for the repair of high-value-added molds.

last updated Jun 23, 2020

Hydrogen Plasma Cleaning Device (Ion Cleaning Type)

H2 (Surface cleaning of various substrates using the reducing power of hydrogen plasma. Improved hydrophilicity and wettability due to the removal of surface oxide layers. A new surface cleaning technology using dry, room temperature treatment.)

last updated Nov 25, 2021