Film Thickness Variation Visualization System | Quantitative Observation of Resist Coating Non-uniformity

Capture the thickness difference with "color." It visualizes the subtle variations and differences in dispensing conditions that arise from the characteristics of viscous fluids with ultra-high sensitivity.

last updated May 12, 2026

Macro inspection device | High-speed simultaneous detection of foreign substances, film unevenness, and defects on wafers.

Imaging 12-inch wafers in 7 seconds. With a unique optical system that captures defects without resolution, inspection time is shortened to one-fourth of the industry standard, enabling 100% inspection.

last updated May 12, 2026