Surface Roughness Visualization Unit | Capturing Nano-Level Crystal Defects at a Macro Scale

Visualizing minute changes of 3nm. By using an off-axis optical system and edge reflection light detection, we capture the distortion and scratches on the wafer surface in a wide area at once.

last updated May 12, 2026

Macro inspection device | High-speed simultaneous detection of foreign substances, film unevenness, and defects on wafers.

Imaging 12-inch wafers in 7 seconds. With a unique optical system that captures defects without resolution, inspection time is shortened to one-fourth of the industry standard, enabling 100% inspection.

last updated May 12, 2026

Surface Roughness Visualization Unit for Semiconductor Quality Control

Capture nano-level crystal defects at a macro scale to improve the accuracy of quality control.

last updated May 12, 2026