Wafer Foreign Object Inspection Module | High-speed detection of 0.1μm at macro level

The night vision optical system does not miss tiny foreign objects. With a unique technology that captures Mie scattered light without resolving, it conducts a complete inspection of 12-inch wafers in just 7 seconds.

last updated May 12, 2026

Macro inspection device | High-speed simultaneous detection of foreign substances, film unevenness, and defects on wafers.

Imaging 12-inch wafers in 7 seconds. With a unique optical system that captures defects without resolution, inspection time is shortened to one-fourth of the industry standard, enabling 100% inspection.

last updated May 12, 2026