Film Thickness Variation Visualization System | Quantitative Observation of Resist Coating Non-uniformity
Capture the thickness difference with "color." It visualizes the subtle variations and differences in dispensing conditions that arise from the characteristics of viscous fluids with ultra-high sensitivity.
This is an optical system for quantitatively visualizing and managing the non-uniformity of film thickness (film unevenness) in the resist coating process. By using a unique "OAS filter" for thin film enhancement processing, it clearly reveals fine unevenness that is difficult to assess with conventional visual inspection. 【Usage Scenarios】 ■ Daily management and condition setting for resist coaters ■ Quantitative observation of unevenness caused by differences in axle rotation speed or time ■ Quality checks during resist lot changes Since even slight differences in conditions during resist dispensing can be captured in macro images, it supports faster process development and stable operation. *For more details, please refer to the catalog or feel free to contact us. *We are currently accepting requests for evaluations on actual machines. The first sample evaluation will be provided free of charge.
basic information
For more details, please refer to the catalog or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the catalog or feel free to contact us.
Related Videos
catalog（2）
Download All Catalogs
Recommended products
Distributors
Smix Corporation is a company specializing in the development, manufacturing, and sales of devices for macro optical inspection. We can perform macro inspections that have a high correlation with CD, capture size variations of 3nm on a macro scale, and visualize the unevenness of mirror-like wafers. By implementing our macro inspection, customers can establish a more efficient and cost-competitive inspection process. Trust us with your macro optical inspection needs.