Excimer UV surface treatment device
Improving process quality through automated processing combined with wet treatment.
■ Effective for etching pre-treatment, resist removal pre-treatment, post-stripping cleaning, and adhesion pre-treatment, etc. ◎ Etching pre-treatment… Hydrophilization, improved uniformity ◎ Resist removal pre-treatment… Removal of the hardened surface layer of the resist ◎ Post-stripping cleaning… Removal of trace resist residues ◎ Adhesion pre-treatment… Increased adhesion strength by removing organic substances ■ Breaks molecular bonds with high photon energy ■ No discharge or damage to substrates or device patterns ■ Instant on/off capability ■ Mercury-free and environmentally friendly ■ Minimal use of N2 * The catalog will be disclosed soon.
basic information
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Applications/Examples of results
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