RCA processing, acid cleaning, acid stripping, various mixed acid treatments
RCA processing, acid cleaning, acid stripping, various mixed acid treatments
RCA processing (SPM, APM, DHF, BHF, O3 water, etc.), acid cleaning, acid stripping, various mixed acid treatments, post-CMP cleaning, post-polishing cleaning, mask cleaning, etc. The above are representative examples. Please consult us for more details.
1～7 item / All 7 items
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New Type UDS Spin Coater (Resist Stripping/Lift-Off System)
Significant reduction in footprint and purchase costs, increased throughput, and substantial improvement in substrate quality.
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New type UDS spin sheet device (etching, RCA, cleaning, developing, etc.)
Significant reduction in footprint and purchase costs, increased throughput, and substantial improvement in substrate quality.
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Spin & conveyor processing equipment (etching, cleaning, stripping)
High-quality substrates can be provided with high throughput and low cost!
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Spin wafer processing equipment (etching, RCA, cleaning, developing, etc.)
A spin sheet device that can obtain high-quality substrates at a low cost.
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Fully automatic batch processing equipment (substrate regeneration, etching, RCA cleaning, etc.)
High throughput, high reliability, low-cost batch processing equipment.
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New Type Semi-Automatic UDS Spin Sheet Device
Of course, RCA, development, etching, cleaning, stripping, lift-off, etc.! We have a wealth of experience in various process treatments.
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New Type SpinDip Processor: Lift-off, Organic Stripping, Deburring
Practical application of ultrasonic ultrasonic technology mounted on a spin sheet device!
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