Fluid control of EUV resist without waste - Syringe pump Excalibur
Tekan's syringe pump, known for its proven track record in the development of coating equipment requiring high precision and accuracy. Compact yet designed to be extremely robust.
Fluid control syringe pump that does not waste expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) at a low cost. It allows for easy control of flow rate from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml (*) Volume adjustment unit: minimum 2nl (*) Flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min (*) *Dependent on the capacity of the installed syringe. Example: When a 2.5ml syringe is installed Volume adjustment unit: minimum 104nl Flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, and a report function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. It has a working volume memory function. Built robustly to reduce service costs for embedded devices and contributes to lowering the failure occurrence rate of the equipment.
basic information
＝＝＝＝＝ Overview ＝＝＝＝＝ ★ For the technical specifications of the OEM syringe pump, please download and view the catalog. ＝＝＝＝＝ Features ＝＝＝＝＝ The most popular syringe pump from Tekan in recent years Made from a single aluminum die-cast for high durability and to prevent distortion. 【Compact】 Palm-sized, height 127mm 【High Precision】 Dispensing accuracy 0.05% CV/FS 【Flow Rate】 83nl/second to 4.1 ml/second 【High Resolution】 24,000 Steps 【Programming】 Control programming can be easily performed via RS232 or RS485 interface. Packed with convenient features through the pre-installed firmware.
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Model number/Brand name
Excalibur
Applications/Examples of results
Clinical testing, water quality testing, food testing, petroleum refining, semiconductor cleaning, pharmaceutical testing, quality control, pharmaceutical production, chemical production.
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Tecan is a company that was established in Switzerland in 1980, specializing in the manufacturing and development of life science research support equipment. With the support of many customers, we were able to celebrate our 30th anniversary in Japan in 2022. Tecan Japan operates two businesses. One is the life sciences business, which delivers Tecan-branded products such as automated pipetting systems and microplate readers to end-users. The other is the partnering business, which provides components and equipment as OEM products for partner companies. Our customers span a wide range of fields, including disease research, drug discovery, biotechnology, clinical testing (such as cancer diagnosis, infectious disease diagnosis, and testing centers), scientific analysis, and robotic surgery. Our mission is to improve people's lives and health. Tecan Japan aims to contribute to global health care innovation from the life sciences industry to clinics by supporting our customers' daily activities.