Precision dispenser pump Excalibur for quarter developers.
Tekan's dispensing pump, which has a proven track record in the development of coating equipment that requires high precision and accuracy. It is compact yet designed to be extremely robust.
Fluid control syringe pump that prevents waste of expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) while being cost-effective. It allows for easy flow rate control from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml Volume adjustment unit: minimum 2nl and above Adjustable flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min and above (2nl/sec) *Depends on the syringe capacity used Example: When using a 2.5ml syringe Volume adjustment unit: minimum 104nl and above Adjustable flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min and above (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, as well as a reporting function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. Memory function for operating volume. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment.
basic information
＝＝＝＝＝ Overview ＝＝＝＝＝ ★ For the technical specifications of the OEM syringe pump, please download and view the catalog. ＝＝＝＝＝ Features ＝＝＝＝＝ The most popular syringe pump from Tekan in recent years Made from a single aluminum die-cast for high durability and to prevent distortion. 【Compact】 Palm-sized, height 127mm 【High Precision】 Dispensing accuracy 0.05% CV/FS 【Flow Rate】 83nl/second to 4.1 ml/second 【High Resolution】 24,000 Steps 【Programming】 Control programming can be easily done via RS232 or RS485 interface. Packed with convenient features through pre-installed firmware.
Price information
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Delivery Time
Model number/Brand name
Excalibur
Applications/Examples of results
Clinical testing, water quality testing, food testing, petroleum refining, semiconductor cleaning, pharmaceutical testing, quality control, pharmaceutical production, chemical production.
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JACLaS EXPO 2026 Exhibition
◆◇◆ We introduce contract development and manufacturing services for diagnostic and medical devices, as well as precision pumps and robotic arms for OEM purposes. ◆◇◆ Tekan utilizes reliable liquid handling and robotic technology to provide a variety of OEM equipment and components in the fields of clinical testing and life sciences. From optimal equipment concept development for the global market to compliance with regulations in various countries and local services, Tekan leverages its extensive resources to provide support. If you have challenges or goals such as the following, please visit the Tekan booth: - You want to develop or improve preprocessing devices or next-generation devices for your current systems. - You want to launch high-quality in-house preprocessing and automated analysis devices. - You want to achieve development that exceeds market expectations through strategic industrial and UI/UX design.
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JACLaS EXPO 2026 Exhibition
Dates: October 8 (Thursday) to October 10 (Saturday), 2026 Venue: Kobe International Exhibition Hall Tekan Booth: Hall 3 D-29 Tekan utilizes highly reliable liquid handling and robotic technology to provide a variety of OEM equipment and components in the fields of clinical testing and life sciences. From developing optimal equipment concepts for the global market to complying with regulations in various countries and providing local services, Tekan leverages its abundant resources to offer support. If you have challenges or goals such as the following, please visit the Tekan booth: - You want to develop and improve preprocessing devices or next-generation devices for your current systems. - You want to launch high-quality in-house preprocessing and automated analysis devices. - You want to achieve development that exceeds market expectations through strategic industrial and UI/UX design.
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Tecan is a company that was established in Switzerland in 1980, specializing in the manufacturing and development of life science research support equipment. With the support of many customers, we were able to celebrate our 30th anniversary in Japan in 2022. Tecan Japan operates two businesses. One is the life sciences business, which delivers Tecan-branded products such as automated pipetting systems and microplate readers to end-users. The other is the partnering business, which provides components and equipment as OEM products for partner companies. Our customers span a wide range of fields, including disease research, drug discovery, biotechnology, clinical testing (such as cancer diagnosis, infectious disease diagnosis, and testing centers), scientific analysis, and robotic surgery. Our mission is to improve people's lives and health. Tecan Japan aims to contribute to global health care innovation from the life sciences industry to clinics by supporting our customers' daily activities.