【Semiconductor Manufacturing Process】Low Pulsation / Micro / Ultra High Resolution Syringe Pump
It enables extremely precise flow control, achieving a very low pulsation and smooth flow of liquid.
The optimal solution for the needs of "uniform film thickness," "constant concentration of trace components," and "accurate liquid cut-off at the nozzle tip" in semiconductor manufacturing! Please consider our low-pulse, high-reproducibility syringe pump. ＝＝＝＝＝ Overview ＝＝＝＝＝ The Centris Pump is a compact syringe pump module with high accuracy, reliability, and reproducibility. Its simple yet robust mechanical design requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ Please download the catalog to view the technical specifications of the Centris Pump ★ ＝＝＝＝＝ Features ＝＝＝＝＝ - Long-life ceramic valves and ceramic syringes Capable of handling high liquid temperatures - High reproducibility: less than 0.05% CV/FS - High resolution: 181,490 steps - Programmable flow rate: 5 nl/s to 5 ml/s - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.
basic information
For more details, please download the PDF or contact us.
Price range
Delivery Time
Model number/Brand name
Cavro Centris pump
Applications/Examples of results
Achieves ultra-high precision in small-volume pipetting. ■ Management of chemical solutions in semiconductor manufacturing processes (coating, cleaning, etching, etc.) ■ Microfluidics ■ Chromatography ■ Flow cytometry ■ Surface plasmon resonance (SPR) devices
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Tecan is a company that was established in Switzerland in 1980, specializing in the manufacturing and development of life science research support equipment. With the support of many customers, we were able to celebrate our 30th anniversary in Japan in 2022. Tecan Japan operates two businesses. One is the life sciences business, which delivers Tecan-branded products such as automated pipetting systems and microplate readers to end-users. The other is the partnering business, which provides components and equipment as OEM products for partner companies. Our customers span a wide range of fields, including disease research, drug discovery, biotechnology, clinical testing (such as cancer diagnosis, infectious disease diagnosis, and testing centers), scientific analysis, and robotic surgery. Our mission is to improve people's lives and health. Tecan Japan aims to contribute to global health care innovation from the life sciences industry to clinics by supporting our customers' daily activities.